SiC外延生长设备感应电源电磁干扰及防护措施设计  

Design of Electromagnetic Interference of Induction Power Supply and Protective Measures for SiC Epitaxial Growth Equipment

作　　者：周立平 陈国钦 熊峥 鲁彤 ZHOU Liping;CHEN Guoqin;XIONG Zheng;LU Tong(The 48^(th) Research Institute of CETC,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2024年第2期42-45,62,共5页Equipment for Electronic Products Manufacturing

摘　　要：在SiC外延生长设备的研制过程中,出现感应电源对设备其它部件存在电磁干扰,影响数据采集的稳定性和真实性,不利于设备控制的稳定性。分别从干扰现象、干扰机理、防护措施对问题进行阐述、分析和解决。During the development of SiC epitaxial growth equipment,it is found that the induction power supply has electromagnetic interference to other parts of the equipment,which affects the stability and authenticity of data acquisition and is not conducive to the stability of equipment control.In this paper,the interference phenomenon,interference mechanism and protection measures are discussed,analyzed and solved.

关 键 词：SiC外延 半导体设备 电磁干扰 防护措施 

分 类 号：TN304.05[电子电信—物理电子学]