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作 者:刘晓玲 LIU Xiaoling(The 2^(nd) Research Institute of CETC,Taiyuan 030024,China)
机构地区:[1]中国电子科技集团公司第二研究所,山西太原030024
出 处:《电子工业专用设备》2024年第2期46-51,共6页Equipment for Electronic Products Manufacturing
摘 要:针对天线阵列激发电磁场的特性,通过矩形波导上使用槽天线来激发表面波等离子体(SWP)的方式构建了三维模型,并在HFSS软件上进行了仿真测试。仿真结果证实,槽天线由矩形波导转换的圆形波导传输,波导的长度和槽的数量都会影响微波能量耦合。在优化的天线结构中,谐振器中的电场强度比未优化的天线结构中的电场强度高一到两个数量级,并且具有更好的空间均匀性。验证了理论与仿真结果的一致性,先前的实验结果也可以部分验证仿真的正确性。总之,新的天线阵列可以帮助形成柱等离子体并增强其均匀性。Focusing on the characteristics of the electromagnetic field excited via the antenna array,a three-dimensional model is constructed by using a slot antenna on a rectangular waveguide to excite a surface wave plasma(SWP),and tested the feasibility of simulation on commercial software of HFSS.As the simulation results,the slot antenna is transmitted by a circular waveguide converted by a rectangular waveguide.It is confirmed that both the length of the waveguide and the number of slots affect the microwave energy coupling.In the optimized antenna structure,the electric field intensity in the resonator is one to two orders of magnitude higher than that in the unoptimized antenna structure and has better spatial uniformity.The consistency between the theory and the simulation results is verified and previous experimental results can also partially confirm the correctness of the simulation.In conclusion,the new antenna array can help to form column plasma and enhance its uniformity.
分 类 号:TN605[电子电信—电路与系统]
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