微波陶瓷介质滤波器成型烧结工艺可靠性研究  

Reliability Study on the Molding and Sintering Process of Microwave Ceramic Dielectric Filter

作　　者：李医虹 李亚飞 冯小东[1] 韦俊杰 彭胜春[1] LI Yihong;LI Yafei;FENG Xiaodong;WEI Junjie;PENG Shengchun(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2024年第2期164-170,共7页Piezoelectrics & Acoustooptics

摘　　要：该文从微波陶瓷材料NP37本身出发,压制标准件,通过对密度、电性能测试及内部切片形态观测验证不同成型压力、烧结设备(气氛炉和隧道炉)、烧结温度工艺下对坯体制作性能及可靠性的影响。研究表明,在成型压力2000 kg、隧道炉1160℃烧结工艺下,坯体性能及可靠性测试结果最佳。将其用于介质滤波器的坯体制作、介质滤波器坯体的切片、扫描电镜(SEM)测试、热震试验及温度冲击试验,结果验证了此成型烧结工艺可靠性较高。结果表明,通过验证标准件成型烧结工艺指导介质滤波器生产的方法能有效地提高产品可靠性。Starting with the microwave ceramic material NP37 itself,standard parts were pressed,and the effects of different molding pressures,sintering equipment(atmosphere furnace and tunnel furnace),and sintering temperature processes on the performance and reliability of the produced parts were investigated.This investigation involved density and electrical performance testing,as well as internal slice morphology observations.The optimal performance and reliability test results for a green body were achieved using a molding and sintering process with a forming pressure of 2000 kg and a tunnel furnace temperature of 1160℃.These conditions were applied to produce a dielectric filter body,and slice observations,scanning electron microscopy testing,thermal shock testing,and temperature shock testing confirmed the high reliability of this molding and sintering process.The results suggest that guiding the production of dielectric filters through the verification of the standard component molding and sintering process can effectively enhance product reliability.

关 键 词：陶瓷材料 介质滤波器 成型工艺 烧结工艺 可靠性 

分 类 号：TN384[电子电信—物理电子学]