基于兰姆波压电谐振器的高频低相噪MEMS振荡器仿真研究  

Simulation Studyon High-Frequency and Low-Phase-Noise MEMS Oscillator Based on Lamb Wave Piezoelectric Resonator

作　　者：赵颖 崔向东 ZHAO Ying;CUI Xiangdong(Institute of Systems Engineering,AMS,PLA,Beijing 100142,China)

机构地区：[1]中国人民解放军军事科学院系统工程研究院,北京100142

出　　处：《压电与声光》2024年第2期191-196,共6页Piezoelectrics & Acoustooptics

摘　　要：发达的现代通信设备对时钟源器件提出了更高的要求,在保障频率信号稳定的同时还需要器件具备可集成、微型化等特点,微机电系统(MEMS)振荡器因其具备这些优势,已逐渐替代传统振荡器,成为电子设备中信号源的常用元器件。该文设计了一种MEMS振荡器并对其进行仿真测试,该振荡器的核心选频器件由Lamb波压电谐振器组成,在应用于振荡电路前,对设计的MEMS谐振器进行了仿真测试,并提出两种优化其寄生模态的方法,所得谐振器的品质因数(Q)为1357.5,串联谐振频率为70.384 MHz。将优化后谐振器应用于振荡电路后,对振荡器输出信号和相位噪声进行测试,结果表明,MEMS振荡器的输出载波频率为70.58 MHz,相位噪声为-64.299 dBc/Hz@1 Hz及-144.209 dBc/Hz@10 kHz。With advancement in modern communication equipment,increasingly higher requirements are placed on clock source devices.These devices must exhibit the characteristics of integration and miniaturization while ensuring frequency signal stability.Microelectromechanical system(MEMS)oscillators,which conform to these requirements,are gradually replacing traditional oscillators as signal sources in electronic equipment.This study entailed the design and simulation of a type of MEMS oscillator wherein the core frequency selection device is composed of a Lamb wave piezoelectric resonator.Prior to its application to anoscillator circuit,the designed MEMS resonator was simulated and tested,and two methods to optimize its parasitic mode were devised.Thus,a Q value of 1357.5 and series resonance frequency of 70.384 MHz were obtained for the resonator.The optimized resonator was applied to anoscillator circuit,and the output signal and phase noise of the oscillator were tested.Consequently,MEMS oscillators with an output carrier frequency of 70.58 MHz and phase noises of-64.299 dBc/Hz@1 Hz and-144.209 dBc/Hz@10 kHz were obtained.

关 键 词：压电谐振器 寄生模态抑制 低相位噪声 微机电系统(MEMS)振荡器 

分 类 号：TN384[电子电信—物理电子学] TN713