精密激光小角度测量装置设计  

Design of Precision Laser Small Angle Measuring Device

作　　者：邵竑文 刘勇[2] 张大鹏 韩素超 郑明珠[2] SHAO Hongwen;LIU Yong;ZHANG Dapeng;HAN Suchao;ZHENG Mingzhu

机构地区：[1]石家庄海山实业发展总公司 [2]北京航天计量测试技术研究所 [3]河北翼凌机械制造总厂

出　　处：《计量与测试技术》2024年第3期49-52,共4页Metrology & Measurement Technique

摘　　要：本文激光小角度测量装置采用正弦原理和激光干涉技术,实现对小角度量高准确度测量。该装置具有独立的回转轴系,可确保稳定性;采用400mm大臂长结构设计,可提高灵敏度;空心式角隅棱镜等光学器件设计和光源的选择,可避免多种误差源的干扰。同时,在高准确度的小角度计量方面,提出了多种新的设计和改进,实现了小角度测量误差优于0.05″,并通过同等级仪器间的测量比对,验证整套装置良好的测量效果。In this paper,the laser small Angle measuring device adopts the sinusoidal principle and laser interference technology to achieve high accuracy measurement of small Angle.The device has an independent rotating shafting to ensure stability;using 400mm long arm structure design,can improve the sensitivity;the design of optical devices such as hollow corner prism and the choice of light source can avoid the interference of multiple error sources.At the same time,in the aspect of high accuracy small Angle measurement,a variety of new designs and improvements are proposed,and the small Angle measurement error is better than 0.05″,and through the measurement comparison between the same grade instruments,the good measurement effect of the whole set of devices is verified.

关 键 词：小角度 正弦原理 空心角隅棱镜 塞曼效应 

分 类 号：TH712[机械工程—测试计量技术及仪器]