基于MEMS可变形反射镜的激光整形研究  

Laser shaping research based on MEMS deformable mirror

作　　者：董圣骏 王艺霏 赵江宏 李明磊 岱钦[1,2] DONG Shengjun;WANG Yifei;ZHAO Jianghong;LI Minglei;DAI Qin(College of Science,Shenyang Ligong University,Shenyang 110159,China;Liaoning Provincial Key Laboratory of High Performance Laser and Application,Shenyang 110159,China)

机构地区：[1]沈阳理工大学理学院,沈阳110159 [2]辽宁省高性能激光器及应用重点实验室,沈阳110159

出　　处：《黑龙江工程学院学报》2024年第2期44-49,共6页Journal of Heilongjiang Institute of Technology

基　　金：国家自然科学基金项目(52171187);高端外国专家资助计划(GD220013)。

摘　　要：应用MEMS可变形反射镜进行激光光束整形技术研究。首先建立平顶光束整形的理论模型,通过近轴透镜聚焦后的光场,利用柯林斯广义衍射积分公式对高斯光束整形模拟仿真,分析不同束腰半径和发散角的高斯光束对整形成平顶光束的影响。设计基于可变形反射镜的平顶光束整形的光路实验,通过平顶光束整形的理论模型和泽尼克多项公式,得到MEMS可变形反射镜各单元的驱动电压参数,实现平顶光束整形光场分布。在基于MEMS可变形反射镜的激光整形研究分析中,利用波前传感器对整形平顶光束进行光斑分析,得到基于可变形反射镜的平顶光束整形实验结果。对实验结果和理论仿真进行对比分析,得到其规律基本一致,结果较为理想。The MEMS deformable mirror is applied for the study of laser beam rectification technology,and the theoretical model of flat-top beam shaping is firstly established.The effect of Gaussian beam shaping with different beam waist radii and divergence angles on the shaping of flat-top beam is analyzed by simulating the Gaussian beam shaping through the focused optical field of the near-axis lens and using the Collins generalized diffraction integral formula.The optical path experiment of flat-top beam shaping based on deformable mirrors is designed,and the theoretical model of flat-top beam shaping and Zernike’s polynomial formula are used to obtain the driving voltage of each MEMS deformable mirror and realize the distribution of flat-top beam shaping light field.In the research and analysis of laser shaping based on MEMS deformable mirrors,the beam spot analysis of the shaped flat-top beam is carried out by using the wavefront sensor,and the experimental results of flat-top beam shaping based on deformable mirrors are obtained.The experimental results and the theoretical simulation are compared and analyzed.The experimental results are basically consistent with the theoretical simulation law,and ideal experimental results are obtained.

关 键 词：平顶光束 MEMS可变形反射镜 激光光束整形 束腰半径 发散角 泽尼克多项公式 

分 类 号：TN249[电子电信—物理电子学]