无氧铜表面玻璃绝缘层烧制工艺研究  

Research on sintering process of glass insulating layer on surface of oxygen-free copper

作　　者：吴亮亮 梁立振 钱玉忠 吕迅 许吉禅 孟献才 陶鑫 胡纯栋 WU Liangliang;LIANG Lizhen;QIAN Yuzhong;LÜXun;XU Jichan;MENG Xiancai;TAO Xin;HU Chundong(School of Mechanical and Electrical Engineering,Anhui University of Science and Technology,Huainan 232001,China;Institute of Energy,Hefei Comprehensive National Science Center,Hefei 230031,China;School of Materials Science and Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]安徽理工大学机电工程学院,安徽淮南232001 [2]合肥综合性国家科学中心能源研究院,安徽合肥230031 [3]合肥工业大学材料科学与工程学院,安徽合肥230009

出　　处：《绝缘材料》2024年第4期82-87,共6页Insulating Materials

基　　金：国家自然科学基金资助项目(12105135);安徽省协同创新计划项目(GXXT-2021-015、GXXT-2022-005)。

摘　　要：为解决天线内置型射频等离子体中无氧铜线圈的匝间绝缘问题,本文研究了一种能够在无氧铜表面烧制玻璃绝缘层的工艺,并详细研究该工艺中不同表面处理方式、粘结剂、烧制温度等因素对玻璃绝缘层性能的影响。结果表明:对无氧铜表面进行酸洗预处理相对于碱洗能够显著提高低温釉料在铜表面的润湿性,减少绝缘层表面“孔隙”的产生;同时添加适量的Na_(2)SiO_(3)·5H_(2)O粘结剂能够改善玻璃绝缘层与铜表面的界面结合效果,并提高玻璃绝缘层表面的硬度;此外,绝缘层表面硬度随着烧制温度的升高逐步提高,且绝缘层表面的“孔隙”数量逐步减少;最终根据该工艺制备了表面烧制玻璃绝缘层的无氧铜线圈天线,实现了长时间的放电维持,有效解决了放电过程中匝间的绝缘问题。In order to solve the problem of turn-to-turn insulation for oxygen-free copper coils in radio frequency plasma of antenna built-in type,a process capable of sintering a glass insulating layer on the surface of oxygen-free copper was studied,and the effects of factors such as different surface treatment method,binder,and sintering temperature of the process on the performance of glass insulating layer were investigated in detail.The results show that the oxygen-free copper surface after acid washing pretreatment can significantly improve the wettability of low-temperature glaze on the copper surface compare to alkali washing,and reducing the"porosity"on the insulating layer surface.At the same time,an appropriate adding amount of Na_(2)SiO_(3)-5H_(2)O binder can improve the interface combination effect between the glass insulating layer and the copper surface,and improve the hardness of glass insulating layer surface.In addition,the surface hardness of the insulating layer increases with the increase of the sintering temperature,and the number of"porosity"on the insulating layer surface is gradually reduced.An oxygen-free copper coil antenna with a glass insulating layer on the surface was finally prepared according to this process,which achieved a long-time discharge maintenance and effectively solved the turn-to-turn insulation problem during discharge process.

关 键 词：玻璃绝缘层 低温釉 表面处理方式 粘结剂 烧制温度 

分 类 号：TM215.7[一般工业技术—材料科学与工程]