基于电涡流效应的绝对式直线位移传感器误差分析及抑制方法研究  

Study on Error Analysis and Suppression Methods of Absolute Linear Displacement Sensor Based on Eddy Effect

作　　者：吴玉龙 武亮[1,2] 李佩林 WU Yuong;WU Liang;LI Peilin(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology;Chongqing Key Laboratory of Time Grating Sensing and Advanced Detection Technology,School of Mechanical Engineering,Chongqing University of Technology)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心 [2]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆理工大学机械工程学院

出　　处：《仪表技术与传感器》2024年第3期14-20,86,共8页Instrument Technique and Sensor

基　　金：重庆市自然科学基金项目(cstc2021jcyj-msxmX0375);重庆市巴南区科技成果转化及产业化专项(2021TJZ002);重庆市研究生科研创新项目(cys23704)。

摘　　要：基于电涡流效应的绝对式直线位移传感器具有结构简单、分辨率高、响应速度快和抗干扰能力强的特点。相比于增量式直线位移传感器,该类型的传感器不仅不受断电的影响,还能实现更加快速和精确的绝对定位。但是,传感器制造、安装及电信号处理等环节处理不理想会产生无效电动势,带来对极内的1次、2次和4次误差。针对上述问题,使用信号补偿的方式抑制1次和2次误差,采用空间移相的方式消除感应信号中的3次谐波,以此抑制4次误差。对优化后的传感器进行误差抑制实验,验证了误差来源分析的正确性以及抑制方法的有效性。实验表明:误差抑制后的传感器节距内误差峰峰值由32μm优化为6μm,性能大幅度提升。Absolute linear displacement sensors based on the eddy current effect are characterized by a simple structure,high resolution,fast response and strong anti-interference ability.Compared with incremental displacement sensors,sensors of this type are not only unaffected by power cuts,but also can faster and more accurate absolute positioning.However,the sensors have much possibility to encounter first-order,second-order and four-order errors in pitch when any stage,such as fabrication,installment and signal processing,is not as good as desired.In order to solve above described problems,the first-order and second-order errors were suppressed using signal compensation,and the four-order error was suppressed by eliminating the three-order harmonic using spatial phase shifting.By doing error suppression experiments on optimized sensors,it is verified that the analysis about the sources of errors and the suppression methods are valid.Experimental results show that the peak-to peak error of the sensor optimized from 32μm to 6μm under error suppression,and significantly improved performance.

关 键 词：绝对式测量 电涡流 直线位移传感器 误差分析 

分 类 号：TH711[机械工程—测试计量技术及仪器]