压电式多维力传感器研究  

Research of Piezoelectric Multidimension Force Sensor

作　　者：张军[1] 仲育颉 任宗金[1] 钱敏[1] 王郁赫 张鹏[1] ZHANG Jun;ZHONG Yujie;REN Zongjin;QIAN Min;WANG Yuhe;ZHANG Peng(School of Mechanical Engineering,Dalian University of Technology,National Key Laboratory of High Performance Precision Manufacturing)

机构地区：[1]大连理工大学机械工程学院,高性能精密制造全国重点实验室

出　　处：《仪表技术与传感器》2024年第3期29-32,56,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(52075097);国家科技重大专项项目(J2019-V-0011-0106);国家重点研发计划(2019YFA0709000)。

摘　　要：针对传统压电测力仪有效测试区域有限、在不同测试位置输出结果不一致、扭矩值获取繁琐的等问题,基于传感器布置方式及石英晶片切型的特点,提出一种采用正八边形晶片的多维力传感器。在理论分析的基础上,通过计算仿真验证了正八边形晶片的设计合理性。对研制的多维力传感器进行了标定实验,标定结果显示:各传感器切向灵敏度高、各向线性及重复性好、向间干扰小,具有良好的测试性能。Aiming at the problems of traditional piezoelectric dynamometer such as limited effective testing area,inconsistent output results at different test positions and tedious torque value acquisition,a multi-dimensional force sensor based on regular octagonal chip was proposed based on sensor layout and the characteristics of quartz chip cutting.On the basis of theoretical analysis,the design rationality of regular octagon chip was verified by calculation and simulation.The calibration experiments of the developed multi-dimension force sensor were carried out.The calibration results show that the sensors have high tangential sensitivity,good anisotropic linearity and repeatability,little interdirectional interference and good test performance.

关 键 词：切削力测量 压电式测力仪 压电传感器 标定实验 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]