飞秒激光制备硬脆材料红外微光学器件及应用(特邀)  

Femtosecond Laser Fabrication of Infrared Micro⁃Optical Devices Based on Hard and Brittle Materials and Their Applications(Invited)

作　　者：祁金勇 郑家鑫 张鑫 赵智炎 刘子健 田克帅 李超 刘学青[1] Qi Jinyong;Zheng Jiaxin;Zhang Xin;Zhao Zhiyan;Liu Zijian;Tian Keshuai;Li Chao;Liu Xueqing(State Key Laboratory of Integrated Optoelectronics,College of Electronic Science&Engineering,Jilin University,Changchun 130012,Jilin,China)

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点实验室,吉林长春130012

出　　处：《中国激光》2024年第4期278-295,共18页Chinese Journal of Lasers

基　　金：国家自然科学基金(62105117);吉林省重大科技专项(20220301003GX)。

摘　　要：近年来,红外微光学器件由于在红外传感与成像、红外探测等领域中具有重要的应用价值而得到了飞速发展,直接在硬脆材料衬底上制备的红外微光学器件更是在苛刻环境应用领域中具有不可代替的作用。针对此需求,已经有研究人员提出了多种高精密制造方法。其中,飞秒激光加工由于真三维加工等独特优势已经被广泛应用于各种复杂三维微纳结构的制备,也为解决硬脆材料红外微光学器件的制备问题提供了新的思路。从飞秒激光加工技术、常用红外光学材料以及基于飞秒激光加工的硬脆材料红外微光学器件的制备和应用方面入手,梳理了近些年此领域的发展情况,重点介绍了折射器件和衍射器件等红外微光学器件以及飞秒激光加工技术在红外传感与成像、红外探测等领域中的应用,并对飞秒激光加工硬脆材料红外微光学器件的发展趋势进行了展望。Significance Infrared light,which is also known as infrared radiation,is located between the visible and microwave bands,with a wavelength range of 0.76‒1000.00μm.Unlike visible light,which can be directly perceived by the human eye,infrared radiation is located outside the range of human visual perception,with a wavelength range that is approximately 2500 times wider than that of visible light.The special physical properties of infrared radiation give it a wide range of applications in the aviation,aerospace,biomedical,industrial,military,and scientific research fields,along with others.The infrared-radiation propagation process includes strong absorption and scattering,along with a wide range of wavelengths.General optical devices cannot detect and utilize infrared radiation,and there are different application requirements for different infrared wavelengths.It is also necessary to choose appropriate infrared materials when preparing infrared optical devices.With the development of theoretical research,and science and technology,future opto-mechanical systems need to integrate as many functions as possible in as small a range as possible,which leads to new requirements for the miniaturization and integration of micro-optical components.Compared with traditional infrared optical devices,infrared micro-optical devices have advantages that include a small size,light weight,good stability,flexible manufacturing methods,low cost,and easy integration.Therefore,they have very bright application prospects in fields that include infrared sensing and imaging,infrared detectors,and infrared window penetration enhancement.At the same time,hard and brittle materials can withstand high temperature and high pressure in various extreme environments because of their good optical properties and physicochemical stability,and have irreplaceable roles in certain demanding military fields.However,their excellent physicochemical stability also produces greater challenges when preparing infrared micro-optical devices made of various

关 键 词：激光技术 飞秒激光 硬脆材料 红外微光学器件 红外微光学应用 

分 类 号：TN249[电子电信—物理电子学]