用于原子磁强计的超表面集成反射型气室设计  

Design of a Metasurface⁃Integrated Reflective Vapor Cell for Atomic Magnetometers

作　　者：史镕瑞 雷程[1] 梁庭[1] 王涛龙 刘士琳 王丙寅 陈国锋 Shi Rongrui;Lei Cheng;Liang Ting;Wang Taolong;Liu Shilin;Wang Bingyin;Chen Guofeng(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,Shanxi,China;Inner Mongolia Power Machinery Institute,Hohhot 010000,Inner Mongolia,China)

机构地区：[1]中北大学动态测试技术国家重点实验室,山西太原030051 [2]内蒙古动力机械研究所,内蒙古呼和浩特010000

出　　处：《中国激光》2024年第2期180-185,共6页Chinese Journal of Lasers

基　　金：山西省重点研发计划项目(202102030201001,202102030201009);中央引导地方科技发展资金(YDZX20201400001664)。

摘　　要：原子磁强计以其高灵敏度和成本低等优势受到了越来越多的关注,如今,进一步提高原子磁强计的芯片集成度已成为主要趋势,因为它有利于生物磁性测量与成像。但是,目前实现原子磁强计小型化的主要障碍是微加工原子气室的光学元件分立。鉴于此,笔者提出一种基于新兴超表面的超紧凑片上原子气室方案,该方案将超表面与各向异性腐蚀的单晶硅相结合,在保证高灵敏度的同时提高了原子气室的集成度。该方案能够对圆偏振入射光束进行光路操纵,效率可达到80%。超表面采用厚度为500 nm的硅设计而成,可以通过基本的微加工工艺直接在原子气室上制造。所设计的新型原子气室具有集成度高、可大批量制造的优点,为未来生物磁性传感系统的发展提供了参考。Objective Magnetic brain data play a crucial role in neurological analysis and monitoring human brain health.Various sensors have been developed to detect magnetic fields resulting from brain activity.These include superconducting quantum interference devices(SQUID),fluxgate magnetometers,giant magnetoresistive sensors,and atomic magnetometers.Recently,micromachined atomic magnetometers have gained significant interest due to their small size,affordability,and superior performance.Central to these magnetometers is the miniaturized alkali metal atomic gas chamber.Chip-scale alkali metal atomic gas chambers present advantages like smaller size,reduced cost,and higher yield compared to their millimeter-scale glass counterparts.However,atomic magnetometers based on chip-scale alkali metal atomic gas chambers face challenges due to the short optical range length.While many solutions have been suggested,achieving a specific light incident angle on the chip remains intricate,and the fabrication consistency is hard to maintain.Thus,integrating optical systems within alkali-metal atomic gas chambers remains a predominant challenge.However,the rise of micro-and nano-photonics,coupled with advancements in nanofabrication,has spurred interest in artificial quasitwo-dimensional electromagnetic material hypersurfaces.These are compatible with modern micro-and nano-fabrication platforms,paving the way for unprecedented miniaturization of optical systems.Since most chip-scale alkali metal atomic gas chambers manufactured using MEMS-based processes involve the triple anodic bonding of glass-silica-glass,on-chip integration of metasurfaces becomes feasible.In this study,a strategy for optical path integration of micromachined alkali metal atomic gas chambers using the supersurface method is presented.This can achieve a deflection angle of 19.48°with over 80%efficiency.The micromachined planar structure of the device allows it to bond directly to the atomic gas chamber’s transparent window.This ensures that the vertically incide

关 键 词：表面光学 超表面 异常折射 原子气室 原子磁强计 光路集成 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O562[自动化与计算机技术—控制科学与工程]