基于MoS_(2)薄膜耦合波导的高品质因数传感特性研究  

Sensing Characteristics with High Figure-of-Merit Based on MoS_(2) Thin Film Coupled Waveguide

作　　者：陈颖[1] 王建坤 丁志欣 李美洁 赵蒙 赵国廷 Chen Ying;Wang Jiankun;Ding Zhixin;Li Meijie;Zhao Meng;Zhao Guoting(Hebei Province Key Laboratory of Test/Measurement Technology and Instrument,School of Electrical Engineering,Yanshan University,Qinhuangdao 066004,Hebei,China)

机构地区：[1]燕山大学电气工程学院测试计量技术与仪器河北省重点实验室,河北秦皇岛066004

出　　处：《中国激光》2024年第2期186-194,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(62275228);河北省重点研发计划项目(19273901D,20373301D);河北省自然科学基金项目(F2020203066)。

摘　　要：在波导耦合表面等离子体共振传感器结构中引入MoS_(2)材料,提出了一种全介质MoS_(2)薄膜混合耦合波导结构传感器,该结构使得低品质因数(FOM)波导中产生了频域较宽的宽共振,而高FOM波导中产生了频域较窄的窄共振,实现了双波导耦合,进而产生了Fano共振。对传感结构进行了数值模拟与分析研究,探究了MoS_(2)层数及各结构参数对传感性能的影响,并依据其影响将两波导厚度、相邻两层介质材料厚度、MoS_(2)层数作为输入参数,将FOM值作为输出参数,建立了基于深度极限学习机的优化算法。利用优化算法对权值参数进行优化,对比不同优化算法对光谱的优化能力,最终得到了GWO-DELM预测模型。结果表明,Fano形状可以通过改变结构参数进行动态调控。在最佳条件下,经过优化算法优化后的Fano共振的FOM值高达50000。Objective As an optical device that can regulate light waves on the nanoscale,the optical micro-nanostructure has the characteristics of simple fabrication and easy integration.With the rapid development of modern optics,micro/nanostructures have been widely adopted in environmental monitoring,biosensing,medical sample detection,and other fields.Conventional attenuated total reflection sensing structures usually exhibit ohmic loss,whereas molybdenum disulfide(MoS_(2))nanomaterials have good optical properties.Therefore,we considered two-dimensional materials instead of metallic materials to construct an all-medium multilayer membrane structure.However,the global optimization of the sensor structure cannot be realized using only parameter scanning.Therefore,a multilayer composite structure model based on the MoS_(2) hybrid-coupled waveguide mode was proposed.The light transmission characteristics and generation mechanism of the double-waveguide mode were analyzed in combination with the reflection angle spectrum,and the physical mechanism of the Fano resonance and plasmonic induced transparency(PIT)formation was explained.Finally,within a certain parameter range,a deep extreme learning machine model was incorporated to establish the mathematical relationship between the structural parameters,figure-of-merit(FOM)value,and sensitivity.Multiple optimization algorithms were used to determine the extreme values of the DELM neural network model and obtain the best structural parameters.Methods To develop a multilayer composite structure model based on a MoS_(2) hybrid coupled waveguide mode,a geometric model was established using the finite element analysis software,COMSOL Multiphysics.The prism layer comprises chalcogenide glass.The Teflon-PTFE and ZnS waveguide layers doped with polycarbonate(PC)are separated with MoS_(2) layers.The ZnS layer supports the waveguide mode in which electromagnetic waves can propagate.To analyze the sensing performance of the sensor structure in detail,the optical transmission characteris

关 键 词：传感器 Fano共振 MoS_(2)薄膜 双波导耦合 GWO-DELM 

分 类 号：O436[机械工程—光学工程]