光谱共焦传感器关键技术研究进展(特邀)  

Research Progress on Key Technologies of Chromatic Confocal Sensors(Invited)

作　　者：卢荣胜[1] 张紫龙 张艾琳 封志伟 徐艳 杨刘杰 Lu Rongsheng;Zhang Zilong;Zhang Ailin;Feng Zhiwei;Xu Yan;Yang Liujie(School of Instrument Science and Opto-Electronics Engineering,Hefei University of Technology,Hefei 230009,Anhui,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《激光与光电子学进展》2024年第2期57-84,共28页Laser & Optoelectronics Progress

基　　金：国家重点研发计划项目(2023YFF0715502);安徽省重点研发计划项目(202304a05020013)。

摘　　要：精密测量技术是先进制造业得以高速发展的基础。光谱共焦传感器具有测量精度高、检测速度快、系统集成度高等技术优势,已成为先进制造领域当前备受关注的精密测量技术之一。首先,介绍光谱共焦测量原理,分析构成光谱共焦传感器的关键器件;然后,针对点光谱共焦传感器,综述构成传感器的色散物镜、宽光谱光源、光谱检测装置,以及光谱处理算法等关键技术方面的研究进展;其次,针对线扫描光谱共焦传感器,综述扫描方式、光路结构、光谱检测装置,以及光谱信息处理方法等关键技术;最后,总结当前光谱共焦传感器的研究重点、难点,以及未来的技术发展方向。Precision measurement technology is the cornerstone of the rapid advancement of advanced manufacturing.Chromatic confocal sensors,with technological advantages such as high measurement accuracy,rapid detection speed,and high system integration,have become one of the precision measurement technologies currently garnering significant attention in the field of advanced manufacturing.This article begins by introducing the principles of chromatic confocal measurement and analyzing the crucial components comprising the chromatic confocal sensor.Subsequently,focusing on point chromatic confocal sensors,it provides an overview of the research progress in key technologies such as the dispersive objective lens,broad-spectrum light source,spectral detection device,and spectral processing algorithms that constitute the sensor.In the case of line scanning chromatic confocal sensors,it summarizes the critical technologies related to scanning methods,optical path structures,spectral detection devices,and methods for processing spectral information.Finally,it concludes by summarizing the current research focus,challenges,and future technological development directions of chromatic confocal sensors.

关 键 词：光谱共焦传感器 色散物镜 宽光谱光源 光谱仪 峰值提取 

分 类 号：TP74[自动化与计算机技术—检测技术与自动化装置]