High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer  

作　　者：殷子淇 李芳妃 孙云科 邹运 王彦 杨宏兴 胡鹏程 付海金 谭久彬 Ziqi Yin;Fangfei Li;Yunke Sun;Yun Zou;Yan Wang;Hongxing Yang;Pengcheng Hu;Haijin Fu;Jiubin Tan(Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China;Key Laboratory of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China)

机构地区：[1]Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China [2]Key Laboratory of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China

出　　处：《Chinese Optics Letters》2024年第1期47-51,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.52175500);the National Key Research and Development Program of China(No.2022YFF0605102);the Natural Science Foundation of Heilongjiang Province(No.LH2019E048)。

摘　　要：We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined interferometers to achieve synchronous detection and demodulation of multiwavelengths.Coarse and fine synthetic wavelengths are generated by a dual-longitudinal-mode He-Ne laser and four acoustic optical frequency shifters.Further,to improve phase synchronization measurement for multiwavelengths,we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals.Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths,and standard deviation is 1.7×10^(-5)m in a range of 2 m.

关 键 词：MULTIWAVELENGTH absolute distance superheterodyne interferometry phase synchronization 

分 类 号：TH744.3[机械工程—光学工程]