Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface  

作　　者：张植宇 匡程辉 臧昊峰 鲁拥华 王沛 Zhiyu Zhang;Chenghui Kuang;Haofeng Zang;Yonghua Lu;Pei Wang(Department of Optics and Optical Engineering,University of Science and Technology of China,Hefei 230026,China;Advanced Laser Technology Laboratory of Anhui Province,Hefei 230026,China)

机构地区：[1]Department of Optics and Optical Engineering,University of Science and Technology of China,Hefei 230026,China [2]Advanced Laser Technology Laboratory of Anhui Province,Hefei 230026,China

出　　处：《Chinese Optics Letters》2024年第2期109-113,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.U20A20216);the Technology Domain Fund of 173 Project(No.2021-JCJQ-JJ-0284)。

摘　　要：The compact,sensitive,and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging.The metasurface offers a promising solution to develop high-precision displacement metrology.In this work,we proposed and experimentally demonstrated a two-dimensional displacement(XZ)measurement device by a dielectric metasurface.Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence.We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12μm along the z-axis can be resolved with a 900μm×900μm metasurface.Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor.

关 键 词：metasurface transversal and longitudinal displacement measurement 

分 类 号：O436.3[机械工程—光学工程]