基于LC并联谐振的轴向自感式位移传感器设计  

Design of axial self-inductive displacement sensor based on LC parallel resonance

作　　者：唐洪洲 周瑾[1] 金超武[1] 徐园平[1] TANG Hongzhou;ZHOU Jin;JIN Chaowu;XU Yuanping(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《浙江大学学报（工学版）》2024年第5期1072-1079,共8页Journal of Zhejiang University：Engineering Science

基　　金：国家自然科学基金资助项目(52075239,52275537)。

摘　　要：为了满足磁悬浮轴承面向更高精度的发展需求,提出基于LC并联谐振的轴向自感式位移传感器.通过增大谐振回路的等效电感变化率,提高传感器的灵敏度.分析传感器的工作原理.通过有限元仿真,研究传感器设计参数与灵敏度之间的关系.设计传感器的测量电路,结合有限元仿真和数值仿真,分析LC并联谐振对传感器灵敏度的影响.搭建实验台,对传感器的静态性能进行测试.结果表明,相对于传统的位移传感器,提出的传感器具有更高的灵敏度与更低的线性度.An axial self-inductive displacement sensor based on LC parallel resonance was proposed in order to meet the development demands for higher precision in magnetic bearings.The sensitivity of the sensor was improved by increasing the rate of change of equivalent inductance in the resonance circuit.The working principle of the sensor was analyzed.The relationship between the design parameters of the sensor and its sensitivity was analyzed through finite element simulation.Then a measurement circuit for the sensor was designed,and the influence of LC parallel resonance on the sensitivity of the sensor was analyzed combined with finite element simulation and numerical simulation.An experimental setup was constructed to test the static performance of the sensor.Results show that the proposed sensor exhibits higher sensitivity and lower linearity compared with traditional displacement sensors.

关 键 词：位移传感器 并联谐振 测量电路 灵敏度 磁悬浮轴承 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]