投影微立体光刻技术在微流控芯片领域的研究进展  

Research Progress of Projection Microstereolithography Technology in Microfluidic Chip Field

作　　者：姜丁瑞 张栩源 靳聪 柏寒之 厉婉琪 张彩勤 陈翔 Jiang Dingrui;Zhang Xuyuan;Jin Cong;Bai Hanzhi;Li Wanqi;Zhang Caiqin;Chen Xiang(Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Department of SurgeryⅡ,Huanggang Hospital of Traditional Chinese Medicine,Huanggang 438000,China)

机构地区：[1]上海交通大学电子信息与电气工程学院微纳电子学系,上海200240 [2]黄冈市中医医院外二科,湖北黄冈438000

出　　处：《微纳电子技术》2024年第4期26-37,共12页Micronanoelectronic Technology

基　　金：国家自然科学基金(82103052)。

摘　　要：对投影微立体光刻(PμSL)技术在微流控芯片领域的优势进行了简要概述,介绍了其技术原理以及数字微镜设备(DMD)的工作机制。分析了影响PμSL技术提高XY平面和Z轴打印分辨率的因素,重点讨论了通过优化光学系统、树脂配方、打印方式及图像算法等途径以提高单步制作微流控封闭管道Z轴分辨率的技术方法,并介绍了PμSL技术在多材料打印领域的研究进展。此外,对近年来国内外利用PμSL技术制备微流控功能器件、器官芯片的研究进展进行了介绍。最后,对PμSL技术在微流控芯片领域当前面临的Z轴分辨率较低、靶面与精度较难平衡和器官芯片打印材料生物相容性差等问题进行了探讨,并对其未来发展方向进行了展望。The advantages of projection microstereolithography(PμSL)technology in the field of microfluidic chips are briefly reviewed,and the principle of PμSL technology and the working mechanism of digital micro-mirror devices(DMDs)are introduced.The factors influencing the PμSL technology to improve the printing resolutions of XY plane and Z-axis are analyzed.The technical methods to improve the Z-axis resolution of the microfluidic closed pipe fabricated by single-step are emphatically discussed from the aspects of optimizing optical system,resin formulation,printing mode,image algorithm and other ways.And the research progress of PμSL technology in multi-material printing field is introduced.Besides,research progress of microfluidic functional devices and organ-on-chips fabricated by PμSL technology at home and abroad in recent years are introduced.Finally,current problems of PμSL technology faced in the field of microfluidic chips,such as lower Z-axis resolution,difficulty of balance between the target surface and precision,and poor biocompatibility of organ-on-chips printing materials are discussed,and the future development prospects are forecasted.

关 键 词：投影微立体光刻(PμSL)技术 微流控技术 高精度打印 多材料打印 器官芯片 

分 类 号：TN305.7[电子电信—物理电子学]