基于相控阵与合成孔径聚焦方法的CMUT阵列虚拟声源成像技术  

CMUT Array Virtual Sound Source Imaging Technology Based on Phased Array and Synthetic Aperture Focusing Method

作　　者：张甜 宋金沙 乔冰琴[1] 邵星灵[2] 武洋 王智豪 Zhang Tian;Song Jinsha;Qiao Bingqin;Shao Xingling;Wu Yang;Wang Zhihao(Big Data College,Shanxi Finance&Taxation College,Taiyuan 030024,China;State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]山西省财政税务专科学校大数据学院,太原030024 [2]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2024年第4期147-155,共9页Micronanoelectronic Technology

基　　金：山西省高等学校科技创新项目(2023L533);国家自然科学基金国家重大科研仪器研制项目(61927807);中央引导地方科技发展资金项目(YDZJSX2022A062)。

摘　　要：对电容式微机械超声换能器(CMUT)阵列成像中的相控阵(PA)和合成孔径聚焦技术(SAFT)的综合方法进行研究,使用CMUT子阵列形成虚拟声源,并利用虚拟声源的辐射能量进行超声成像。通过对比不同孔径的超声波声束发散程度,得到CMUT阵列最佳子孔径阵元数量为9,CMUT阵列实验通过将子孔径阵元数量从1到15依次增加,观察水中两个不同深度的钉子成像清晰度来验证最佳子孔径阵元数量。与传统全矩阵捕捉(FMC)成像技术相比,多阵元SAFT合成的虚拟声源辐射能力更强,所以有更好的探测深度,同时由于利用子阵列进行超声数据采集,因此减少了CMUT超声成像系统的硬件采集通道数。The comprehensive methods of phased array(PA)and synthetic aperture focusing technology(SAFT)in the imaging of capacitive micromachined ultrasonic transducer(CMUT)arrays were investigated.A virtual sound source was formed using CMUT sub-arrays,and the radiation energy of the virtual sound source was utilized for ultrasound imaging.By comparing the divergence degree of ultrasonic beams with different apertures,it can be obtained that the optimal number of sub-aperture array elements for the CMUT array is 9.The CMUT array experiment verifies the optimal number of sub-aperture array elements by increasing the number from 1 to 15 in sequence and observing the imaging clarity of two nails at different depths in water.The virtual sound source radiation capability of multi-array-element SAFT is stronger than that of the traditional full matrix capture(FMC)imaging technology,resulting in better detection depth.Meanwhile,due to the use of sub-arrays for ultrasound data acquisition,the hardware acquisition channel number of the CMUT ultrasound imaging system is reduced.

关 键 词：电容式微机械超声换能器(CMUT)阵列 合成孔径 相控阵(PA) 虚拟声源 超声成像 

分 类 号：TB552[理学—物理]