基于非对称光束的焦面漂移测量和主动校正  

Drift Measurement and Correction of Optical Focus Planes Based on Nonsymmetric Beam

作　　者：王浩 金鑫[2] 李辉[2] 刘智颖[1] Wang Hao;Jin Xin;Li Hui;Liu Zhiying(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Suzhou Institute of Biomedical Engineering and Technology,Chinese Academy of Sciences,Suzhou 215163,Jiangsu,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《激光与光电子学进展》2024年第4期214-220,共7页Laser & Optoelectronics Progress

基　　金：江苏省重点项目(BE2020664)。

摘　　要：电动化、智能化的光学显微成像系统需要能够实时测量系统的焦面漂移并进行校正,从而实现对活细胞的长时间观测和全片的病理切片扫描。设计一种探测非对称光束界面反射后的光斑位置从而进行焦面漂移测量的方法。利用ZEMAX软件光学仿真了反射光斑在不同离焦情况下的光斑形状,搭建了集成化的漂移测量模块并在商用正置显微镜上对其进行了验证。结果表明,针对60×浸油物镜,所提系统的漂移测量精度达250 nm,漂移校正的响应时间小于500 ms,满足了高分辨率长时间成像的要求。Automated and intelligent optical microscopy necessitates the measurement and correction of the focal plane drift for many biomedical applications,such as long-term observation of living cells and pathological whole slide imaging.In this study,we designed a method to perform focal plane drift measurements based on the detection of the reflected spot position of a nonsymmetric beam.Through simulations using ZEMAX software,the shapes of the reflected spots were simulated on the sample surface at different defocus positions.Furthermore,an integrated focus plane drift measurement module was constructed and tested on a commercial upright microscope.The results reveal that the proposed module exhibits a drift measurement precision of 250 nm and a response time of less than 500 ms for a 60×oil immersion objective,satisfying the demand for long-term and high-resolution imaging.

关 键 词：光学系统 自动聚焦 轴向漂移 非对称光束 闭环反馈 

分 类 号：O436[机械工程—光学工程]