大口径非球面反射镜零位补偿器误差标定方法  

Error Calibration Method of Null Correctors for Large-Aperture Aspherical Mirrors

作　　者：徐秋云 孔令臣 Xu Qiuyun;Kong Lingchen(School of Photoelectric Engineering,Changzhou Institute of Technology,Changzhou 213032,Jiangsu,China)

机构地区：[1]常州工学院光电工程学院,江苏常州213032

出　　处：《激光与光电子学进展》2024年第4期335-340,共6页Laser & Optoelectronics Progress

基　　金：国家自然科学基金青年科学基金项目(11603052)。

摘　　要：非球面反射镜通常使用零位补偿器配合干涉仪进行面形检测,因此零位补偿器的加工和装配精度直接决定了检测结果的可靠性。提出一种具备良好通用性的基于计算全息片(CGH)的补偿器误差标定方法。以一块Φ856 mm、f/1.54的双曲面反射镜作为待测非球面镜,首先设计反射式CGH,运用光线追迹法得到CGH的相位函数,使其引入的球差与待测非球面主镜的法线像差相同,再由ZEMAX仿真计算验证该设计的正确性,并根据相位函数加工出主全息。在同一块玻璃基片上设计和加工对准全息带用于标定光路的调整。实验结果表明,所制作的CGH标定零位补偿器的精度达到λ/80。可见对于大口径、快焦比的凹非球面反射镜,所提方法仍然适用,因此可用于指导多数正轴非球面镜的零位补偿器标定。Aspheric mirrors commonly utilize a zero position compensator along with an interferometer for surface shape detection.Therefore,the machining and assembly accuracy of the zero position compensator play a crucial role in determining the reliability of the detection results.This paper introduces a universal compensation error calibration method based on computer generated hologram(CGH).To test the method,aΦ856 mm,f/1.54 hyperboloid mirror is employed as the target aspheric mirror.First,a reflective CGH is designed,and the phase function of the CGH is determined using a ray tracing method.This ensures that the introduced spherical aberration is the same as the normal aberration of the aspheric main mirror to be tested.Subsequently,the correctness of the design is confirmed through ZEMAX simulation calculation,and the primary hologram is processed based on the phase function.Holographic strips are designed and processed on the same glass substrate for adjusting the calibration optical path.The experimental results demonstrate that the CGH calibration achieves a zero position compensator accuracy ofλ/80.The proposed method is applicable to concave aspheric mirrors with large apertures and fast focal ratios.Consequently,it can serve as a reliable guide for calibrating zero position compensators in most positive axis aspheric mirrors.

关 键 词：零位补偿器 干涉检测 计算全息片 相位函数 光线追迹 

分 类 号：P111.2[天文地球—天文学] O436.1[机械工程—光学工程]