飞秒激光直写光波导放大器与激光器(特邀)  

Femtosecond Laser Direct-Writing Optical Waveguide Amplifiers and Lasers(Invited)

作　　者：孙翔宇 陈智 王宇莹 陈道远 刘小峰[3] 马志军 钟理京 邱建荣[2,4] Sun Xiangyu;Chen Zhi;Wang Yuying;Chen Daoyuan;Liu Xiaofeng;Ma Zhijun;Zhong Lijing;Qiu Jianrong(Zhejiang Lab,Hangzhou 311100,Zhejiang,China;College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China;School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China;Institute of Light+X Science and Technology,College of Information Science and Engineering,Ningbo University,Ningbo 315211,Zhejiang,China)

机构地区：[1]之江实验室,浙江杭州311100 [2]浙江大学光电科学与工程学院,浙江杭州310027 [3]浙江大学材料科学与工程学院,浙江杭州310027 [4]宁波大学信息科学与工程学院光+X交叉科学与技术研究院,浙江宁波315211

出　　处：《激光与光电子学进展》2024年第3期70-90,共21页Laser & Optoelectronics Progress

基　　金：国家重点研发计划项目(2021YFB2802001);国家自然科学基金(62105297,62375246);浙江省自然科学基金(LZ23F050002,LQ22F050022)。

摘　　要：飞秒激光直写技术因其精度高、效率高、脉冲持续时间短、峰值功率高且能在多种材料中加工的优点,已被广泛应用于制备各种集成光电器件、光学传感器件。近几年,飞秒激光直写光波导放大器与激光器已经被越来越多的人关注。本文主要介绍飞秒激光直写光波导放大器和激光器的最新研究进展,包括:Type-Ⅰ型、Type-Ⅱ型、脊型和可变截面光波导放大器和激光器的波导传输和插入损耗、光放大增益特性,以及波导激光输出特性。最后,对该技术及其相关研究进展进行总结、分析、归纳,并展望该领域未来研究、应用和发展方向。Femtosecond laser direct-writing technology is being increasingly employed in the fabrication of integrated optoelectronic and optical sensor devices.This technology is popular due to its precision,efficiency,brief pulse duration,substantial peak power,and versatility in material processing.In recent years,the advancements in femtosecond laser direct writing,specifically in the context of optical waveguide amplifiers and lasers have garnered increasing research attention.This article mainly introduces the latest research progress of femtosecond laser direct writing optical waveguide amplifiers and lasers,including waveguide transmission and insertion losses,optical amplification gain characteristics,and waveguide laser output characteristics of Type-Ⅰ,Type-Ⅱ,ridge,and variable cross-section optical waveguide amplifiers and lasers.Finally,the paper concludes with a synthesis and analysis of the current technological progress,along with a prospective outlook on the future research,applications,and development trends within this domain.

关 键 词：飞秒激光直写 光波导 波导放大器 波导激光器 

分 类 号：TN249[电子电信—物理电子学]