薄膜铌酸锂光电器件与超大规模光子集成(特邀)  

Thin Film Lithium Niobate Electro-Optic Devices and Ultralarge-Scale Photonic Integration(Invited)

作　　者：程亚 Cheng Ya(School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China;State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]华东师范大学物理与电子科学学院,上海200241 [2]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800

出　　处：《中国激光》2024年第1期386-402,共17页Chinese Journal of Lasers

基　　金：国家重点研发计划(2019YFA0705000,2022YFA1205100,2022YFA1404600);科技创新2030―“量子通信与量子计算机”重大项目(2021ZD0301403);国家自然科学基金(12192251);上海市“科技创新行动计划”集成电路科技支撑专项项目(21DZ1101500);上海市市级科技重大专项(2019SHZDZX01)。

摘　　要：近年来,薄膜铌酸锂光子集成技术发展极为迅速,其背后有着深刻的物理、材料、技术原因。单晶薄膜铌酸锂为解决光子集成芯片领域长期存在的低传输损耗、高密度集成以及低调制功耗需求提供了至今为止综合性能最优的解决方案。面向未来的新一代高速光电器件与超大规模光子集成芯片应用,本文回顾了薄膜铌酸锂光子技术的起源及其近期的快速发展,讨论了若干薄膜铌酸锂光子结构的加工技术,并展示了一系列当前性能最优的薄膜铌酸锂光子集成器件与系统,包括超低损耗可调光波导延时线、超高速光调制器、高效率量子光源,以及高功率片上放大器与片上激光器。这些器件以其体积小、质量轻、功耗低、性能好的综合优势,将对整个光电子产业产生难以估量的影响。Objective The recent advancement in thin film lithium niobate photonic integration technology has been rapid,driven by profound physical,material,and technological factors.Single crystal thin film lithium niobate is particularly noteworthy for offering the most comprehensive performance solution to date,addressing long-term challenges in low transmission loss,high-density integration,and low modulation power consumption within the realm of photonic integrated circuits.This paper provides an overview of the origin and recent swift development of thin film lithium niobate photonic technology,focusing on its potential for the future generation of high-speed optoelectronic devices and ultra-large-scale photonic integrated circuit applications.Various processing technologies for thin film lithium niobate photonic structures are discussed,accompanied by the introduction of current high-performance devices and systems.These include ultra-low loss tunable optical delay lines,ultra-fast light modulators,high-efficiency quantum light sources,as well as high-power on-chip amplifiers and lasers.These devices,distinguished by their unprecedented advantages of small size,light weight,low power consumption,and high performance,are poised to make a tremendous impact on the entire optoelectronic industry.Significance Since the laboratory production of the lithium niobate single crystal,lithium niobate has emerged as a crucial material in the fields of electro-optics and nonlinear optics.Optical modulators based on the linear electro-optic effect,utilizing lithium niobate,offer notable advantages including high modulation rates,a substantial extinction ratio,low chirp,and high linearity.In the 21st century,integrated photonics technology has gained increasing attention for two primary reasons.Firstly,the demand for photonic devices with attributes such as low energy consumption,high-performance computing,and reconfiguration capabilities has surged due to the explosive growth in applications for information technology,including big

关 键 词：光子集成 光波导 光调制器 微波光子学 光量子集成器件 薄膜 薄膜铌酸锂 

分 类 号：TN256[电子电信—物理电子学]