面向光学/精密结构的碳化硅制备和应用进展  

Research and Development of SiC Ceramic Fabrication Technologies for Optics and Fine Structures

作　　者：张舸[1,2] 崔聪聪 李伟[1,2] 董斌超 曹琪[3] 周立勋 郭聪慧 张巍 徐传享 朱万利 包建勋[1,2] Zhang Ge;Cui Congcong;Li Wei;Dong Binchao;Cao Qi;Zhou Lixun;Guo Conghui;Zhang Wei;Xu Chuanxiang;Zhu Wanli;Bao Jianxun(Changchun Institute of Optics,Fine Mechanics and Physics,China Academy of Sciences,Changchun 130033,Jilin,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Chinese Academy of Sciences,Changchun 130033,Jilin,China;Changchun Changguang KingCera Composites Co.Ltd.,Changchun 130033,Jilin,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院光学系统先进制造技术重点实验室,吉林长春130033 [3]长春长光精瓷复合材料有限公司,吉林长春130033

出　　处：《光学学报》2024年第4期56-77,共22页Acta Optica Sinica

基　　金：吉林省科技发展计划(YDZJ202303CGZH024);长春市重点研发计划(21ZY04)。

摘　　要：碳化硅陶瓷具有力学和热学综合性能优势,已广泛应用于光学/精密结构构件的制造。综述了应用于天/地基先进光电系统领域的碳化硅陶瓷制备技术国内外现状,对比分析了常压烧结、反应烧结、气相转化/沉积三种已获得工程化应用的致密化技术,以及预制体成型技术和材料性能调控方法;介绍了碳化硅陶瓷的增材制造技术,及其应用于光学/精密结构构件制备的进展;总结了超大口径、超高复杂度碳化硅陶瓷的连接技术。阐述了不同应用场景对碳化硅陶瓷的性能需求及其面临的挑战,展望了碳化硅陶瓷制备技术的发展趋势。Significance Due to the outstanding thermal-mechanical properties and the high resistance to radiation,abrasion,and corrosion,SiC ceramics can be ranked as the optimal materials for the manufacture of the optics and the precision structures for space/ground-based advanced opto-mechanical systems.They fulfill the increasing demands of aperture enlargement,weight budget reduction,thermomechanical management simplification,and long-term stability.During the past three decades,ESA,NASA,JAXA,CASC,China Academy of Sciences,and so forth have been making great efforts to develop SiC components for remote sensors and telescopes for civilian and military applications at the cutting edge of the new generation optomechanical system development.The material preparation technologies and the relevant fabrication technologies,which determine the performance of the SiC components,the modules,and even the whole system,are the focus of the investigation and study.Progress The major concerns of the great efforts paid to the SiC preparation technologies are the accomplishment of optical surface density,the homogeneity,and the isotropy of the SiC blanks,which are essential for the optomechanical application,as well as the improvement of the thermomechanical properties such as specific modulus and thermal stability,and the manufacturability of the large-scale structural complexities.Among various SiC preparing technologies presented in Fig.1,the densification methods of pressureless sintering,the reaction sintering/bonding and the chemical vapor composition/converting(CVC),combining the suited forming techniques for preforms,are proven to be effective for the SiC optics and precision structures.The pressureless sintered SiC possesses relatively better mechanical performance and homogeneity.It has presented isotropy,thermostability,and machinability during the development and in-orbit services of Herschel Space Observatory's(2009)Φ3.5 m primary mirror,GAIA(2014)and Euclid's(2023)all-SiC optomechanical structures.The maximum sizes of mo

关 键 词：光学材料 碳化硅陶瓷 光学/精密结构构件 致密化技术 增材制造 连接技术 

分 类 号：TB321[一般工业技术—材料科学与工程]