高分辨率量子点图案化技术  

Patterning Technology of High-Resolution Quantum Dots

作　　者：潘友江 林立华 杨开宇 陈伟 胡海龙 郭太良 李福山 Pan Youjiang;Lin Lihua;Yang Kaiyu;Chen Wei;Hu Hailong;Guo Tailiang;Li Fushan(Institute of Optoelectronic Display Technology,Fuzhou University,Fuzhou 350108,Fujian,China;Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350108,Fujian,China)

机构地区：[1]福州大学光电显示技术研究所,福建福州350108 [2]福建省光电信息科技创新实验室,福建福州350108

出　　处：《光学学报》2024年第2期36-51,共16页Acta Optica Sinica

基　　金：国家自然科学基金(62075043);国家重点研发计划(2022YFB3606500)。

摘　　要：由于量子点优异的材料特性,包括可调的能带间隙、高量子产率、高稳定性和可低成本地溶液加工等,其在显示领域引发了浓厚的兴趣和研究热潮。近年来,随着全世界对高质量显示的需求日益增长,特别是随着虚拟/增强现实(VR/AR)等近眼显示技术的兴起,对高亮度、高分辨率、高效率以及低功耗的显示技术提出了更高的要求。本文全面探讨了高分辨率量子点图案化技术,深入解析它们的工艺流程,并详细阐述它们在量子点显示器件中的各种应用。此外,还概述了高分辨率量子点图案化技术在实际应用中所面临的主要挑战。我们认为,要将高分辨率量子点图案化技术真正地应用到实际设备中,必须全面考虑各种因素,不仅包括从图案化技术出发,同时还涉及到从材料选择和器件结构设计等多个角度的深入思考和策划。本综述可为高分辨率量子点图案化技术行业的发展和研究提供有价值的参考。Significance The evolution of display technology is a cornerstone of modern technological advancement,fundamentally transforming how humans interact with machines.This transformation is vividly apparent in human-computer interactions,where the integration of sophisticated display technologies has led to more intuitive and immersive experiences.The global living standard improvement has further fueled expectations for advanced display devices,with consumers seeking higher quality,efficiency,and functionality.The advent of near-eye display technologies such as augmented reality(AR),mixed reality(MR),and virtual reality(VR)has only heightened the demands for high-resolution microdisplays.These emerging technologies require displays that provide not only high resolution but also compactness,energy efficiency,and the ability to reproduce colors accurately and vividly.The current market is dominated by micro-LED technology and recognized for its superior brightness and energy efficiency.However,the production of full-color micro-LEDs poses significant challenges,chiefly in the massive transfer of differently colored LED chips onto a single wafer.This process demands an exceptionally high yield rate,making it both technologically challenging and costly.As a new type of semiconductor nanocrystal materials with quantum confinement effects,quantum dots(QDs)have sparked great interest in the display field due to their unique properties such as tunable bandgaps,high quantum yields,high stability,and potential for cost-effective solution processing.QDs typically adopt a core-shell structure[Fig.1(a)]and by adjusting the energy levels of the core-shell structure,excitons within the QDs can be confined.Organic ligands on the surface of QD shells provide steric hindrance among the dots,thus preventing aggregation and fluorescence quenching.The physicochemical properties of QDs can be adjusted by changing their organic ligands.Since Alivisatos's research team first reported LEDs with QDs as the electroluminescent layer in 1994,QD

关 键 词：显示技术 量子点 高分辨率 图案化技术 

分 类 号：O482.31[理学—固体物理]