DLC基纳米多层膜摩擦学性能的研究进展与展望  

Research Progress and Prospects on Tribological Properties of DLC Based Nano-multilayer Films

作　　者：汤鑫 王静静[1] 李伟[1] 胡月 鲁志斌[2] 张广安[2] TANG Xin;WANG Jingjing;LI Wei;HU Yue;LU Zhibin;ZHANG Guang'an(School of Materials and Chemistry,Shanghai University of Technology,Shanghai 200093,China;State Key Laboratory ofSolid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China)

机构地区：[1]上海理工大学材料与化学学院,上海200093 [2]中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州730000

出　　处：《表面技术》2024年第8期52-62,共11页Surface Technology

基　　金：中国科学院兰州化学物理研究所固体润滑国家重点实验室开放课题(LSL-2205);上海高校青年教师培养资助计划。

摘　　要：类金刚石(DLC)薄膜是一种良好的固体润滑剂,能够有效延长机械零件、工具的使用寿命。DLC基纳米多层薄膜的设计是耐磨薄膜领域的一项研究热点,薄膜中不同组分层具备不同的物理化学性能组合,能从多个角度(如高温、硬度、润滑)进行设计来提升薄膜力学性能、摩擦学性能以及耐腐蚀性能等。综述了DLC多层薄膜的设计目的与研究进展,以金属/DLC基纳米多层膜、金属氮化物/DLC基纳米多层膜、金属硫化物/DLC基纳米多层膜以及其他DLC基纳米多层膜为主,对早期研究成果及现在的研究方向进行了概述。介绍了以上几种DLC基纳米多层膜的现有设计思路(形成纳米晶/非晶复合结构、软/硬交替沉积,诱导转移膜形成,实现非公度接触)。随后对摩擦机理进行了分析总结:1)层与层间形成特殊过渡层,提高了结合力;2)软/硬的多层交替设计,可以抵抗应力松弛和裂纹偏转;3)高接触应力和催化作用下诱导DLC中的sp3向sp2转化,形成高度有序的转移膜,从而实现非公度接触。最后对DLC基纳米多层膜的未来发展进行了展望。Friction and wear can cause surface damage of materials,especially metal materials,and shorten the service life of work pieces.DLC(diamond-like carbon)is an amorphous carbon film composed of mixed structures,usually formed by the mixture of sp2 carbon and sp3 carbon.With high hardness,low friction coefficient,good chemical inertness and biocompatibility,DLC is a kind of film with great potential,which has a wide range of applications in mechanical,electrical,biomedical engineering and other fields.Its super-hard,wear-resistant and self-lubricating properties meet the technical requirements of the modern manufacturing industry.It is widely used as solid lubricant for the surfaces of contact parts that rub against each other.Compared with single-layer DLC films with single component,DLC based nano-multilayer films with alternating layers of two or more components can improve the mechanical and tribological properties better,which is due to that different layers in the nano-multilayer films have different combinations of physical and chemical properties.Therefore,it can be designed from many aspects(such as high temperature,hardness,lubrication,and corrosion)to improve the mechanical properties,tribological properties and corrosion resistance of the films.Usually,the nano-multilayer films have good impact resistance and plastic deformation resistance ability,which can effectively inhibit the formation and propagation of cracks,and have a good cycle service life under high load conditions.In this paper,DLC based nano-multilayer films were systematically reviewed,including metal/DLC based nano-multilayer films,metal nitride/DLC based nano-multilayer films,metal sulfide/DLC based nano-multilayer films and other DLC based nanolayer films.Firstly,the design background and concept of DLC multilayer thin films were elaborated.The design idea of multilayer films was to form a gradient mixing interface between multilayers to achieve gradient changes in composition and properties.This multilayer structure could produce unique

关 键 词：DLC基纳米多层膜 力学性能 摩擦学性能 摩擦机理 结构 

分 类 号：TH117.1[机械工程—机械设计及理论] TH142.2[一般工业技术—材料科学与工程]