耦合谐振系统中基于Fano共振的光学压力传感器  

Optical pressure sensor based on Fano resonance in a coupled resonator system

作　　者：陈召 马昕新 李童 王艺霖 Chen Zhao;Ma Xin-Xin;Li Tong;Wang Yi-Lin(College of Mathematics and Physics,Beijing University of Chemical Technology,Beijing 100029,China;State Key Laboratory of Quantum Optics and Quantum Optics Devices,Shanxi University,Taiyuan 030006,China)

机构地区：[1]北京化工大学数理学院,北京100029 [2]山西大学光电研究所,量子光学与光量子器件国家重点实验室,太原030006

出　　处：《物理学报》2024年第8期131-137,共7页Acta Physica Sinica

基　　金：中央高校基本科研业务费(批准号:buctrc202143);山西大学量子光学与光量子器件国家重点实验室开放基金(批准号:KF202202);国家自然科学基金(批准号:62175010,12174037)资助的课题.

摘　　要：光学压力传感器在微小形变检测、环境监测以及医学领域等方面具有非常重要的作用.然而,外加压力与谐振腔形变前后的光学响应之间的定量关系很难获得.本文提出了一种基于金属-介质-金属波导的耦合谐振腔系统用于实现光学压力传感器.利用有限元方法对该系统的力学特性以及受力前后的光学传输特性进行详细分析.仿真结果显示谐振腔的最大形变量与所施压力呈简单的线性关系.给出了光学压力传感器灵敏度的直接定义,并基于条形腔与槽形腔耦合产生的Fano共振现象,获得了灵敏度为6.75 nm/MPa的光学压力传感器件.除此之外,添加了stub谐振腔,获得了双Fano共振现象,且随着外部压力的变化,两个Fano线型表现出不同的变化规律;特别地,合适的压力数值可使得双Fano共振变成单Fano共振.该结构的特点适用于不同压力下的光学性质变化检测、化学高压实验测量和化学反应动力学过程的研究.Optical pressure sensor plays a very important role in micro deformation detection,environmental monitoring,and medical fields.However,the quantitative relationship between the applied pressure and the optical response of the resonator before and after deformation is difficult to obtain.In this paper,a coupled resonator system based on metal-insulator-metal waveguide for optical pressure sensor is proposed.The mechanical properties of the system and the optical transmission properties before and after applied pressure are analyzed in detail by using the finite element method.Simulation results show that the maximum deformation of the resonator has a simple linear relationship with the applied pressure.We give a direct definition of the sensitivity of the optical pressure sensor.And based on the Fano resonance phenomenon caused by the coupling the slot cavity with the groove cavity,the optical pressure sensor with a sensitivity of 6.75 nm/MPa is achieved.In addition,we add stub resonator to obtain double Fano resonance phenomenon,and with the change of external pressure,the two Fano line types show different change laws.Specifically,a suitable pressure value can make a double Fano resonance become a single Fano resonance.The special features of our suggested structure are applicable to detecting optical property changes under different pressures,chemical high pressure experimental measurement and study of chemical reaction kinetics process.

关 键 词：表面等离激元 金属-介质-金属波导 光学压力传感器 Fano 共振 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]