锑化物超晶格红外探测器研究进展与发展趋势  

Research progress and development trends of antimonide-based superlattice infrared photodetectors

作　　者：张杰 黄敏 党晓玲 刘益新 陈颖超 陈建新[2] Zhang Jie;Huang Min;Dang Xiaoling;Liu Yixin;Chen Yingchao;Chen Jianxin(A Center of Equipment Development Department,Beijing 100034,China;Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]装备发展部某中心,北京100034 [2]中国科学院上海技术物理研究所,上海200083

出　　处：《红外与激光工程》2024年第3期61-71,共11页Infrared and Laser Engineering

摘　　要：锑化物超晶格红外探测器具有均匀性好、暗电流低和量子效率较高等优点,其探测波长灵活可调,可以覆盖短波至甚长波整个红外谱段,是实现高均匀大面阵、长波、甚长波及双色红外探测器的优选技术,得到了国内外相关研究机构的关注和重视,近年来取得了突破性的进展。文中从锑化物超晶格的基本技术原理出发,梳理总结了超晶格红外探测器的发展历程和当前进展,结合超晶格技术特点的分析,初步探讨了超晶格红外焦平面后续发展趋势。Significance Infrared focal plane arrays(FPAs)are indispensable core components in many fields such as aerospace remote sensing,deep space exploration,national defense and security,resource exploration,and industrial control.In recent years,the antimonide-based superlattice is drawing the research interests from all over the world.It has become the prominent candidate to achieve infrared detectors with high-uniform large arrays,extended detection wavelengths to long wave and very long wave,two-color detection and so forth,due to its excellent uniformity,low dark current,relatively high quantum efficiency as well as the tunable detection wavelengths which almost covers the full infrared wavebands from near-infrared(NIR)to very long wave infrared(VLWIR).The basic technical principles of the antimonide-based superlattice for infrared detection,the several development stages and key results,as well as the development trends of the Type-II superlattice infrared focal plane arrays,are sequentially introduced and discussed.As antimonide-based superlattice evolves towards higher pixel density,larger specifications,higher operating temperature,longer detecting wavelength,two-color(multicolor),avalanche devices,it is depicted that the antimonide-based superlattice will always play an important role in many fields especially for infrared sensing and imaging.Progress The development process of antimonide-based superlattice focal plane detectors is divided into three stages.The first stage spans from 1980s to the very beginning of 21st century.This stage includes the proposal of the concept of superlattice infrared detection technology,theoretical calculation and analysis of the performance of superlattice detectors,epitaxial growth of superlattice materials(first MBE growth by HRL),and some preliminary research on basic optoelectronic properties.The research results of this stage demonstrate the decent capabilities of superlattice materials for infrared detection.The second stage spans from the very beginning of 21st century

关 键 词：锑化物超晶格 红外探测器 焦平面 

分 类 号：TN215[电子电信—物理电子学]