基于声光调制器的光学锁相环He-Ne激光稳频方法研究  

Frequency stabilization method of optical phase-locked loop He-Ne laser based on acousto-optic modulator

作　　者：刘宇森 王建波[2] 殷聪[2] 韩绍坤[1] 毕文文 俞秋叶 邹金澎 Liu Yusen;Wang Jianbo;Yin Cong;Han Shaokun;Bi Wenwen;Yu Qiuye;Zou Jinpeng(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;National Institute of Metrology,Beijing 100029,China;College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]中国计量科学研究院,北京100029 [3]中国计量大学测试工程学院,浙江杭州310018

出　　处：《红外与激光工程》2024年第3期93-101,共9页Infrared and Laser Engineering

基　　金：国家重点研发计划项目(2021YFF0603300)。

摘　　要：报道了一种基于声光调制器与光学锁相环相结合的高稳定度激光稳频方法,用于提高热稳频He-Ne激光器的频率稳定度和准确度。为了克服全内腔热稳频He-Ne激光精密调谐困难的缺点,发展了基于声光调制器两次移频的频率调谐光路,有效地消除声光调制器移频光束路径对衍射角θ的依赖。自行研制了具有高灵敏度与捕获带宽的光学锁相环系统,利用声光调制器的高频率响应特性实现热稳频He-Ne激光高速、准确的锁定。成功实现了热稳频He-Ne激光器偏频锁定至碘稳频HeNe激光器。实验结果表明,环路锁定后拍频频率波动在±0.2 Hz范围内,频率抖动的标准差为0.04。偏置频率为30 MHz时,系统在1 s和1000 s积分时间的相对阿伦方差分别为3.3×10^(-9)和1.4×10^(-12)。系统锁定后,压缩后的拍频线宽小于2 kHz。该研究表明,采用基于声光调制器与光学锁相环相结合的激光稳频方法可以实现亚赫兹级的激光频差控制,通过将热稳频He-Ne激光器偏频锁定至高稳定度的参考激光源可以显著提升其频率稳定度和准确度。Objective With the rapid development of the aerospace and microelectronics industries,the demand for ultra precision measurement is also increasing.He-Ne lasers are widely used in mechanical and ultra precision measurement fields due to their excellent coherence and other characteristics.Among them,the thermally stabilized He-Ne laser is suitable as a wavelength scale laser for laser interferometry due to its high frequency stability,good beam quality,and low cost.However,traditional thermally stabilized lasers have poor frequency stability and reproducibility,which cannot further meet the requirements of high-precision laser interferometry for frequency stability and accuracy.This article reports a frequency biased locking system for thermally stable He-Ne laser based on a combination of an acousto-optic modulator and an optical phase-locked loop.This system combines the high-frequency response characteristics of an acousto-optic modulator with the high sensitivity characteristics of an optical phase-locked loop,enabling fast and accurate frequency locking of a thermally stable He-Ne laser.Methods This article reports an optical phase-locked loop bias locking system based on an acousto-optic modulator.An iodine stabilized frequency laser is chosen as master laser,and a thermally stabilized He-Ne laser as the slave laser.The beam of the slave laser is modulated by an acousto-optic modulator and locked onto the master laser.The reference signal for frequency offset locking is a 30 MHz signal generated by a signal generator.Data are collected using a frequency counter.The locking result is shown(Fig.9).Results and Discussions In the experiment,a highly stable He-Ne laser based on intracavity saturation absorption stabilization was used as the wavelength reference source for thermal stabilization laser locking.Through beat frequency measurement with iodine stabilized laser wavelength reference,the results show that the 1 s wavelength stability of the iodine stabilized laser is 1.3×10^(-11),reaching 4.1×10^(-13)in

关 键 词：激光稳频 声光调制器 光学锁相环 偏频锁定 

分 类 号：TN248.2[电子电信—物理电子学]