Acousto-optic scanning multi-photon lithography with high printing rate  

作　　者：Minghui Hong 

机构地区：[1]Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361005,China

出　　处：《Opto-Electronic Advances》2024年第2期1-3,共3页光电进展（英文）

摘　　要：As a manufacturing method that is focused on end-users,3D printing has gained a lot of attention in recent years due to its unique advantages in fabricating complex three-dimensional structures.Various new micro-nano 3D printing methods have been developed to meet the demand for high-precision and high-yield manufacturing1-9.Among them,multi-photon-photon lithography(MPL) is a promising 3D nanofabrication technology due to its capability of true 3D digital processing and nanoscale processing resolution beyond the diffraction limit.It has been widely used to fabricate microoptics10,11,photonic crystals12,microfluidics13,meta-surfaces14,and mechanical metamaterials15.

关 键 词：PHOTON Acous SCANNING 

分 类 号：TP391.73[自动化与计算机技术—计算机应用技术]