Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces  

作　　者：Zaid Haddadin Anna My Nguyen Lisa V.Poulikakos 

机构地区：[1]Department of Electrical&Computer Engineering,University of California San Diego,La Jolla,CA,USA [2]Department of Mechanical&Aerospace Engineering,University of California San Diego,La Jolla,CA,USA [3]Program of Materials Science&Engineering,University of California San Diego,La Jolla,CA,USA

出　　处：《Light(Science & Applications)》2024年第3期390-392,共3页光（科学与应用)（英文版）

摘　　要：An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces,which is essential for the geometric design of intrinsically chiral structures.

关 键 词：DIMENSIONS DIMENSION INTRINSIC 

分 类 号：O43[机械工程—光学工程]