Exceptional points enhance sensing in silicon micromechanical resonators  

作　　者：Man-Na Zhang Lei Dong Li-Feng Wang Qing-An Huang 

机构地区：[1]Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

出　　处：《Microsystems & Nanoengineering》2024年第1期17-25,共9页微系统与纳米工程（英文）

基　　金：supported by the National Key R&D Program of China(Grant No.2022YFB3203600);the National Natural Science Foundation of China(Grant Nos.62074032,62274030,61801110,and 61136006).

摘　　要：Exceptional points(EPs)have recently emerged as a new method for engineering the response of open physical systems,that is,systems that interact with the environment.The systems at the EPs exhibit a strong response to a small perturbation.Here,we show a method by which the sensitivity of silicon resonant sensors can be enhanced when operated at EPs.In our experiments,we use a pair of mechanically coupled silicon micromechanical resonators constituting a parity-time(PT)-symmetric dimer.Small perturbations introduced on the mechanically coupled spring cause the frequency to split from the EPs into the PT-symmetric regime without broadening the two spectrum linewidths,and this frequency splitting scales with the square root of the perturbation strength.The overall signal-tonoise ratio is still greatly enhanced,although the measured noise spectral density of the EP sensing scheme has a slight increase comparable to the traditional counterpart.Our results pave the way for resonant sensors with ultrahigh sensitivity.

关 键 词：RESONANT SYMMETRIC POINTS 

分 类 号：O17[理学—数学]