A self-centering and stiffness-controlled MEMS accelerometer  

作　　者：Yiming Jin Zhipeng Ma Ziyi Ye Mingkang Li Xudong Zheng Zhonghe Jin 

机构地区：[1]School of Aeronautics and Astronautics,Zhejiang University,Hangzhou 310013,China [2]Key Laboratory of Micro/Nano-Satellite Research of Zhejiang Province,Hangzhou 310007,PR China

出　　处：《Microsystems & Nanoengineering》2024年第1期27-40,共14页微系统与纳米工程（英文）

基　　金：supported by a Grant from the National Natural Science Foundation of China(Grant No.62104211).

摘　　要：This paper presents a high-performance MEMS accelerometer with a DC/AC electrostatic stiffness tuning capability based on double-sided parallel plates(DSPPs).DC and AC electrostatic tuning enable the adjustment of the effective stiffness and the calibration of the geometric offset of the proof mass,respectively.A dynamical model of the proposed accelerometer was developed considering both DC/AC electrostatic tuning and the temperature effect.Based on the dynamical model,a self-centering closed loop is proposed for pulling the reference position of the forceto-rebalance(FTR)to the geometric center of DSPP.The self-centering accelerometer operates at the optimal reference position by eliminating the temperature drift of the readout circuit and nulling the net electrostatic tuning forces.The stiffness closed-loop is also incorporated to prevent the pull-in instability of the tuned low-stiffness accelerometer under a dramatic temperature variation.Real-time adjustments of the reference position and the DC tuning voltage are utilized to compensate for the residue temperature drift of the proposed accelerometer.As a result,a novel controlling approach composed of a self-centering closed loop,stiffness-closed loop,and temperature drift compensation is achieved for the accelerometer,realizing a temperature drift coefficient(TDC)of approximately 7μg/℃ and an Allan bias instability of less than 1μg.

关 键 词：STIFFNESS ELECTROSTATIC CENTERING 

分 类 号：O57[理学—粒子物理与原子核物理]