A C-shaped hinge for displacement magnification in MEMS rotational structures  

作　　者：Naga Manikanta Kommanaboina Teferi Sitotaw Yallew Alvise Bagolini Maria F.Pantano 

机构地区：[1]Department of Civil,Environmental and Mechanical Engineering,University of Trento,via Mesiano 77,38123 Trento,Italy [2]Fondazione Bruno Kessler(FBK),Microsystems Technology(MST),via S.Croce 77,38122 Trento,Italy

出　　处：《Microsystems & Nanoengineering》2024年第1期55-66,共12页微系统与纳米工程（英文）

基　　金：supported by the project“MONolithic STRain Engineering platform for TWO-Dimensional materials(MONSTRE 2D)”funded by the MIUR Progetti di Ricerca di Rilevante Interesse Nazionale(PRIN)Bando 2017-grant 2017 Prot.2017KFMJ8E.

摘　　要：The design,analysis,fabrication,and characterization of two distinct MEMS rotational structures are provided;these structures include a classical symmetrical lancet structure and a novel symmetrical C-shaped structure provided with a tilted arm,and both are actuated by thermal actuators.Our proposed C-shaped structure implemented a curved beam mechanism to enhance the movement delivered by the thermal actuators.The geometrical parameters of our proposed device were optimized using the design of experiment(DOE)method.Furthermore,the analytical modeling based on Castigliano’s second theorem and the simulations based on the finite element method(FEM)were used to predict the behavior of the symmetrical C-shaped structure;the results were in good agreement with each other.The MEMS-based rotational structures were fabricated on silicon-on-insulator(SOI)wafers using bulk micromachining technology and deep reactive ion etching(DRIE)processes.The fabricated devices underwent experimental characterization;our results showed that our proposed MEMS rotational structure exhibited a 28%improvement in the delivered displacement compared to the symmetrical lancet structure.Furthermore,the experimental results showed good agreement with those obtained from numerical analysis.Our proposed structures have potential applications in a variety of MEMS devices,including accelerometers,gyroscopes,and resonators,due to their ability to maximize displacement and thus enhance sensitivity.

关 键 词：SHAPED DISPLACEMENT STRUCTURES 

分 类 号：TB383[一般工业技术—材料科学与工程]