Mirrorless MEMS imaging:a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination  

作　　者：Wei-Chih Wang Ming-Yao Li Kuan-Chang Peng Yi-Feng Hsu Benjamin Estroff Pao-Yun Yen David Schipf Wen-Jong Wu 

机构地区：[1]Department of Power Mechanical Engineering,National Tsing Hua University,No.101,Section 2,Kuang-Fu Road,Hsinchu,Taiwan 30013,China [2]Institute of NanoEngineering and Microsystems,National Tsing Hua University,No.101,Section 2,Kuang-Fu Road,Hsinchu,Taiwan 30013,China [3]Department of Mechanical Engineering,University of Washington,Seattle,WA 98195,USA [4]Department of Electrical Engineering,University of Washington,Seattle,WA 98195,USA [5]Department of Engineering Science and Ocean Engineering,National Taiwan University,Taiwan,China

出　　处：《Microsystems & Nanoengineering》2024年第1期175-192,共18页微系统与纳米工程（英文）

基　　金：funded by the Ministry of Science and Technology,Taiwan,China(MOST 104-2218-E-007-026-MY3,MOST 107-2221-E-007-054-MY3,MOST 110-2221-E-007-069,and MOST 111-2221-E-007-101).

摘　　要：This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging.The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT(lead zirconate titanate)bimorph push-pull actuators on a stainless-steel substrate,effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation.By leveraging nonlinear vibration,the scanner achieves a spiral scan pattern from a single signal input,in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs.This capability is further enhanced by a novel process to taper the optical fiber,which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner.The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation.Experimental validation showcases the successful generation of a spiral scan pattern with a 60μm diameter scan area and a 10 Hz frame rate,effectively reconstructing scanned images of 5μm lines,cross patterns(15μm in length with a 5μm gap),and structures of a Psychodidae wing.

关 键 词：steel FIBER SCANNER 

分 类 号：TP334.22[自动化与计算机技术—计算机系统结构]