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作 者:Jianpeng Zhang Song Wei Caichao Liu Chao Shang Zhaoqiang He Yu Duan Zhengchun Peng
机构地区:[1]State Key Laboratory of Radio Frequency Heterogeneous Integration(Shenzhen University),School of Physics and Optoelectronic Engineering,Shenzhen University,518060 Shenzhen,Guangdong Province,P.R.China [2]Linksense Technology Ltd.,518060 Shenzhen,Guangdong Province,P.R.China
出 处:《Microsystems & Nanoengineering》2024年第1期243-256,共14页微系统与纳米工程(英文)
基 金:supported by the joint funding program of the Guangdong Department of Science and Technology and Hongkong Innovation and Technology Fund(2021A0505110015);the Science and Technology Innovation Council of Shenzhen(KQTD20170810105439418 and JCYJ20200109114237902).
摘 要:In this work,we propose porous fluororubber/thermoplastic urethane nanocomposites(PFTNs)and explore their intrinsic piezoresistive sensitivity to pressure.Our experiments reveal that the intrinsic sensitivity of the PFTN-based sensor to pressure up to 10 kPa increases up to 900%compared to the porous thermoplastic urethane nanocomposite(PTN)counterpart and up to 275%compared to the porous fluororubber nanocomposite(PFN)counterpart.For pressures exceeding 10 kPa,the resistance-pressure relationship of PFTN follows a logarithmic function,and the sensitivity is 221%and 125%higher than that of PTN and PFN,respectively.With the excellent intrinsic sensitivity of the thick PFTN film,a single sensing unit with integrated electrode design can imitate human skin for touch detection,pressure perception and traction sensation.The sensing range of our multimodal tactile sensor reaches~150 Pa,and it exhibits a linear fit over 97%for both normal pressure and shear force.We also demonstrate that an electronic skin,made of an array of sensing units,is capable of accurately recognizing complex tactile interactions including pinch,spread,and tweak motions.
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