基于高精度采样和控制系统的扫描电子显微镜高压高稳定电源  

High-voltage and high-stable power supply for scanning electron microscope based on high-precision sampling and control system

作　　者：顾立波 梁昊 Gu Libo;Liang Hao(State Key Laboratory of Nuclear Detection and Nuclear Electronics,University of Science and Technology of China,Hefei 230026,China;Department of Modern Physics,University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学技术大学核探测与核电子学国家重点实验室,安徽合肥230026 [2]中国科学技术大学近代物理系,安徽合肥230026

出　　处：《电子技术应用》2024年第4期102-108,共7页Application of Electronic Technique

摘　　要：针对扫描电子显微镜(Scanning Electron Microscopy,SEM)高分辨率和全天候工作的严格要求,提出并研制了具备高稳定度以及绝缘性能优良的200 kV高稳定性高压直流电源。实验表明该系统能达到3.42‰的开关纹波和2.45‰的工频纹波,每小时的长期稳定性达到0.093‰~0.158‰,能够满足SEM对纹波和稳定性的要求。Aiming at the strict requirements of scanning electron microscope(SEM)high-resolution and all-weather work,a 200 kV high-stability high-voltage DC power supply with high stability and excellent insulation performance was proposed and developed.Experiments show that the system can achieve a switching ripple of 3.42‰and a power frequency ripple of 2.45‰,and the long-term stability per hour can reach 0.093‰~0.158‰,which can meet the requirements of SEM for ripple and stability.

关 键 词：高压直流电源 Sigma-Delta ADC 高精度分压器 

分 类 号：TN86[电子电信—信息与通信工程]