激光技术在金刚石加工中的研究及应用进展  

Research and application progress of laser technology in diamond processing

作　　者：叶盛 赵上熳 邢忠福 彭志勇[2] 郑宇亭 陈良贤 刘金龙 李成明 魏俊俊 Ye Sheng;Zhao Shangman;Xing Zhongfu;Peng Zhiyong;Zheng Yuting;Chen Liangxian;Liu Jinlong;Li Chengming;Wei Junjun(Institute for Advanced Materials and Technology,University of Science and Technology,Beijing 100083,China;Tianjin Jinhang Institute of Technical Physics,Tianjin 300308,China;Shunde Graduate School,University of Science and Technology Beijing,Foshan 528399,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]天津津航技术物理研究所,天津300308 [3]北京科技大学顺德创新学院,广东佛山528399

出　　处：《红外与激光工程》2024年第2期36-57,共22页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(52172037);北京市自然科学基金项目(2212036)。

摘　　要：激光加工是目前金刚石的主流加工方法,相较于传统的机械加工形式,激光加工精度高、效率高、普适性强,因而在金刚石切割、微孔成型、微槽道加工及平整化等方面均得到广泛应用。文中阐述了金刚石激光加工原理,介绍了不同类型激光与金刚石材料相互作用机制,重点总结了近几年多种激光加工金刚石模式的发展现状,分析了新型的激光加工方法的特点,探讨了现阶段激光技术在金刚石加工领域面临的问题、挑战及未来的发展趋势。Significance As an efficient non-contact processing method,laser processing is an ideal processing method for super-hard brittle materials such as diamond.The high-energy laser ablation of diamond greatly improves the processing efficiency of diamond,and the ultra-fast laser processing of diamond ensures the processing accuracy to the greatest extent.At present,laser is widely used in diamond cutting,lapping,micro-grooves and other aspects.Clear diamond laser interaction mechanism and processing control mechanism for laser processing diamond industrial investment laid a foundation.Due to the limitations of traditional machining methods,laser processing methods at home and abroad are the focus of research and development technology.It is foreseeable that laser processing in the field of diamond processing will have a larger proportion,which is of great significance for the back-end application and assembly of diamond.Progress Firstly,the laser generation mode and laser processing mechanism are introduced,including laser generation and main characteristics,how the diamond absorbs laser energy,and the changes of diamond properties and surface morphology caused by the laser.At present,the main research is nanosecond laser and femtosecond laser,which are currently two typical types of laser used for diamond processing,according to the laser wavelength division commonly used a green laser(532 nm),near infrared laser(1064 nm)and ultraviolet laser.Pulsed laser is the focus of current research,for diamond processing,short wavelength and small pulse duration processing quality is higher,while longer pulse duration pulsed laser processing efficiency is higher.With the development of technology,laser processing systems in various countries are developing in a more compatible direction,that is,to achieve good processing quality and high removal efficiency at the same time.Countries have successfully carried out a number of technical studies in the field of laser diamond processing,which has been widely used in production.Acco

关 键 词：金刚石 激光加工 激光切割 微孔成型 微槽道 激光平整化 

分 类 号：TN249[电子电信—物理电子学]