基于入瞳中心的相位测量偏折术透镜波前像差测量  

Wavefront Aberration Measurement of Lenses Using Phase Measuring Deflectometry Based on Entrance Pupil Center of Camera Lens

作　　者：周思旖 李大海[1,2] 葛忍好 张泽坤 ZHOU Si-yi;LI Da-hai;GE Ren-hao;ZHANG Ze-kun(School of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China;School of Aeronautics and Astronautics,Sichuan University,Chengdu 610065,China)

机构地区：[1]四川大学电子信息学院,四川成都610065 [2]四川大学空天科学与工程学院,四川成都610065

出　　处：《光学与光电技术》2024年第2期35-46,共12页Optics & Optoelectronic Technology

基　　金：国家自然科学基金(U20A20215、62375190);四川大学基金(2020SCUNG205)资助项目。

摘　　要：为了实现高精度、高效率地对透射元件的成像质量进行检测,提出了一种基于入瞳中心的相位测量偏折术(Phase Measuring Deflectometry,PMD)测量透镜波前像差的方法。首先阐述了基于相机入瞳中心的相位测量偏折术测量波前像差的正逆光线模型的基本原理,然后利用ZEMAX软件分别对平凸透镜和摄远物镜的波前像差进行模拟测量,模拟结果表明,与通过正逆光线追迹计算的波前像差结果相接近,验证了所提方法的可行性。最后,在实验中,分别测量了平凸透镜和自建摄远物镜的波前像差,并将该方法测量结果和干涉仪所得结果进行对比:平凸透镜测量结果与干涉仪结果的差是RMS=46.7 nm,PV=92.3 nm;摄远物镜测量结果与干涉仪结果的差是RMS=126.9 nm,PV=112.5 nm。结果表明,所提方法的测量结果与干涉仪结果基本一致。为成像透镜的像差测量提供了一种新的有效的方法。In order to achieve high-precision and efficient detection of the imaging quality of transmissive elements,a method for measuring wavefront aberration of lens to be tested based on the entrance pupil center of camera using phase measuring deflectometry(PMD)is proposed in this paper.The basic principles of PMD for wavefront aberration measurement in both forward and reverse ray-tracing models based on the camera's entrance pupil center are described.The simulation measurements of wavefront aberrations for a plano-convex lens and a telephoto lens are conducted using ZEMAX software respectively.The simulation results indicate a close agreement between the wavefront aberrations calculated through forward and reverse ray-tracing models,validating the feasibility of the proposed method.In experiments,the wavefront aberrations of a plano-convex lens and a custom-built telephoto lens are measured,and the measurement results are compared with those obtained from interferometer.The discrepancies between the proposed method and the interferometer are found to be RMS=46.7 nm,PV=92.3 nm for the plano-convex lens,and RMS=126.9 nm,PV=112.5 nm for the telephoto lens,respectively.The results demonstrate that the measurement outcomes of the proposed method agree well with those obtained from interferometer.

关 键 词：相位测量偏折术 入瞳中心 波前像差 透镜 波前检测 相机镜头 

分 类 号：TH74[机械工程—光学工程]