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作 者:吴秀超 聂伟荣[1] 陆海宁 曹云[1] 席占稳[1] WU Xiuchao;NIE Weirong;LU Haining;CAO Yun;XI Zhanwen(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)
机构地区:[1]南京理工大学机械工程学院,江苏南京210094
出 处:《探测与控制学报》2024年第2期40-47,共8页Journal of Detection & Control
摘 要:为了解决传统曲折槽机构在设计阶段的低效性和局限性问题,通过探索不同设计参数对平面曲折槽的质量块位移影响规律,提出一种基于田口法的优化设计方法。采用田口法对影响平面曲折槽质量块的最大位移的5个参数(曲折槽宽度、曲折槽倾角、曲折槽每段长度、锚槽交错间隙和锚槽间隙)在4个水平下进行分析,构建五因素四水平的正交表进行试验分析。通过基于有限元方法的仿真计算,针对不同的尺寸参数组合获得对应的质量块最大位移。利用信噪比分析和方差分析筛选出影响输出响应的重要因子,综合分析得到最佳的设计参数组合,并对优化得到的参数组合进行有限元仿真,在仿真结果中,优化方案的质量块最大位移从1 331μm提高至1 948μm,提升了46.35%。对优化方案的平面曲折槽进行加工,样件试验结果表明质量块最大位移在发射载荷下低于1 800μm,且在勤务载荷下低于1 000μm,达到设计要求,为MEMS平面曲折槽机构的优化设计提供了理论和实验指导。Aiming at the problem of inefficiency and limitation of traditional zigzag groove mechanism in the design stage,by exploring the influence law of different design parameters on mass displacement of plane zigzag groove,an optimization design method was proposed.Taguchi method was used to analyze the five parameters(zigzag groove width,zigzag groove Angle,zigzag groove length,zigzag groove intercrossing clearance and anchor groove clearance)affecting the maximum displacement of the mass block of plane zigzag groove under four levels,and constructed the orthogonal table of five factors and four levels for test analysis.Through the simulation calculation based on finite element method,the corresponding maximum displacement of mass block was obtained according to different dimension parameter combinations.Finally,the important factors affecting the output response were selected by signal-to-noise ratio analysis and variance analysis,and the optimal design parameter combination was obtained by comprehensive analysis.Finite element simulation was carried out on the optimized parameter combination.In the simulation results,the maximum displacement of mass block in the optimization scheme was increased by 46.35%from 1331μm to 1948μm.The experimental results showed that the maximum displacement of mass block reaches 1800μm under launch load and less than 1000μm under service load,which met the design requirements.It provided theoretical and experimental guidance for the optimization design of MEMS planar zigzag groove mechanism.
分 类 号:TJ43[兵器科学与技术—火炮、自动武器与弹药工程]
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