广义椭偏仪双补偿器任意比例旋转控制系统  

Generalized Ellipsometry Double Compensator Arbitrary Proportional Rotation Control System

作　　者：谢大洋 刘政杰 薛鹏[2,3] 张瑞[3] XIE Dayang;LIU Zhengjie;XUE Peng;ZHANG Rui(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Institude of Frontier and Interdisciplinary Science,North University of China,Taiyuan 030051,China;Shanxi Province Optoelectronic Information and Instrument Engineering Technology Research Center,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学前沿交叉科学研究院,山西太原030051 [3]山西省光电信息与仪器工程技术研究中心,山西太原030051

出　　处：《探测与控制学报》2024年第2期125-130,共6页Journal of Detection & Control

基　　金：国家自然基金项目(62105302);山西省基础研究计划项目(20210302124269)。

摘　　要：针对目前广义椭偏仪双旋转补偿器控制旋转比例单一的问题,提出一套基于STM32单片机与步进电机的广义椭偏仪双补偿器任意比例旋转控制系统。该系统采用STM32F1单片机进行编程控制两个步进电机旋转的基础速度、速度比、旋转光学周期数,并通过LabVIEW软件进行编程,获得与之配套的上位机控制系统,完成双补偿器的任意比例旋转控制。通过搭建的广义椭偏实验系统采集双补偿器不同转速比下对空气样本测量的图像,并将其中转速比为5∶3的数据采集结果与理论空气样本波形进行归一化处理。结果显示,实际空气穆勒矩阵与理论穆勒矩阵元素的最大误差为0.014,平均误差为0.004 3,验证了该系统具有较高的可靠性与测量精度。Aiming at the problem of the single control rotation ratio of the double rotation compensator of the generalized ellipsometry at present,a set of arbitrary proportion rotation control system of the double rotation compensator of the generalized ellipsometry based on STM32 and stepping motor was proposed.In this system,stm32f1 was used to program the basic speed,speed ratio and rotation optical cycle number of two stepper motors,and Labview was used to program the upper computer control system to complete the arbitrary proportional rotation control of the double compensator.The generalized ellipticity experiment system was built to collect the images of air samples measured at different speed ratios,and the data acquisition results of 5∶3 speed ratio were normalized with the theoretical air sample waveform.The results showed that the maximum error between the actual air Muller matrix and the theoretical Muller matrix elements was 0.014,and the average error was 0.0043.It was verified that the system had high reliability and measurement accuracy.

关 键 词：广义椭偏仪 双旋转补偿器 速度调控 控制系统 

分 类 号：TN209[电子电信—物理电子学]