合成石英砂工艺概况及几种石英砂的检测数据对比分析  

Synthetic Quartz Sand Process Overview and Comparative Analysis of Several Quartz Sand Detection Data

作　　者：张鹏远 万烨 刘见华 杜俊平 高磊 曹俊英 ZHANG Peng-yuan;WAN Ye;LIU Jian-hua;DU Jun-ping;GAO Lei;CAO Jun-ying(China Silicon Corporation Ltd.LuoYang,471000,China;China ENFI Engineering Co.,Ltd Beijing,100036,China)

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳471000 [2]中国恩菲工程有限公司,北京100036

出　　处：《中国非金属矿工业导刊》2024年第2期55-59,共5页China Non-Metallic Minerals industry

摘　　要：高纯石英砂主要应用于单晶硅制造工艺中的石英坩埚,高端光学玻璃,半导体等领域。大致分为天然砂和合成砂两类,合成砂由于纯度更高,成分可控等优势,更适合于半导体以及更高要求的工艺制程。合成砂的生产不依赖于天然矿产,能缓解我国缺少高品质石英矿的现状,国内对于合成砂的研究还处于起步阶段。本文经过对比天然石英砂、进口合成砂、国产实验室合成砂的各项检测结果,可以指导不同应用条件下的砂选型。研究过程中,发现了可以通过X射线衍射法区分天然砂和合成砂的方法,并列举了粒径、杂质、粒型等检测数据对比。High-purity quartz sand is mainly used in the manufacturing process of single crystal silicon,such as quartz crucibles,high-end optical glass,semiconductors,and other fields.It is roughly divided into natural sand and synthetic sand.Due to its higher purity and controllable composition,synthetic sand is more suitable for semiconductor and higher-demand process manufacturing.The production of synthetic sand does not rely on natural mineral resources,which can alleviate the current situation of a lack of high-quality quartz mines in China.However,domestic research on synthetic sand is still in its infancy.This article compares the testing results of natural quartz sand,imported synthetic sand,and domestic laboratory synthetic sand,which can guide the selection of sand under different application conditions.During the research process,it was found that the method of distinguishing between natural sand and synthetic sand can be achieved through X-ray diffraction.and listed the comparison of particle size,impurities,particle shape,and other testing data.

关 键 词：高纯石英砂 天然石英砂 合成石英砂 石英砂检测 

分 类 号：TD973.3[矿业工程—选矿]