基于频率调制与分振幅解调的广义光谱椭偏技术  

Spectroscopic Mueller Metrix Polarimetry Based on Spectral Modulation and Division of Amplitude Demodulation

作　　者：邓仲勋 权乃承[2] 李思远[3] 张淳民[4] DENG Zhongxun;QUAN Naicheng;LI Siyuan;ZHANG Chunmin(Shenmu Vocational and Technical College,Shenmu 719300,China;School of Materials Science and Engineering,Xi'an University of Technology,Xi'an 710048,China;Key Laboratory of Spectral Imaging Technology CAS,Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710119 China;School of Science,Xi'an Jiaotong University,Xi'an 710049,China)

机构地区：[1]神木职业技术学院,神木719300 [2]西安理工大学材料科学与工程学院,西安710048 [3]中国科学院西安光学精密机械研究所中国科学院光谱成像技术重点实验室,西安710119 [4]西安交通大学理学院,西安710049

出　　处：《光子学报》2024年第4期32-40,共9页Acta Photonica Sinica

基　　金：榆林市科技计划项目(No.CXY-2021-121);国家自然科学基金(No.61805193);陕西省自然科学基础研究计划(No.2023-JCYB-530)。

摘　　要：提出了一种基于频率调制与分振幅解调的广义光谱椭仪方案,与现有时间调制型与时频混合调制型广义光谱椭偏技术相比,其不含运动部件与电控元件,可实现被测样品全部16个Mueller矩阵元素光谱的实时测量。与现有频率调制型广义光谱椭偏技术相比,其测量结果的光谱分辨率更高且降低了通道串扰产生的概率。Thin film and nanostructure measurement technologies have played an important role in production process monitoring in industries such as integrated circuit manufacturing,flat panel displays,and solar cells.Many optical based measurement techniques have emerged to meet the industrial needs of high-speed and non-destructive measurement.Spectroscopic Mueller Metrix Polarimetry(SMMP)is a typical representative of these techniques and has become an important direction in the research and development of thin film and nanostructure measurement technology.It uses a Polarization State Generator(PSG)to convert a certain spectral range of polychromatic light into fully polarized light and project it onto the surface of the sample to be tested,and uses the Polarization State Analyzer(PSA)to detect the polarization state of the reflected or transmitted light on the surface of the sample for obtaining all 16 Mueller matrix elements of the sample as a function of wavelength,and then analyzes and extracts their characteristic parameters such as complex dielectric constant,carrier structure,and film thickness.SMMP can be divided into frequency modulation type and time modulation type according to its working principle.The polarization state generator and polarization state analyzer of the former are both composed of components that can change modulation parameters over time and fixed linear polarizers,such as rotary compensators,liquid crystal phase delay devices,and photoblastic modulators.When measuring in a wide spectral range,the SMMP with dual rotation compensators is the most common:the compensators of PSG and PSA rotate at a certain rate to produce different time modulation frequencies,and then use Fourier transform demodulation to obtain all 16 Mueller matrix elements of the sample,which takes a long measurement time and is not suitable for situations where Mueller matrix elements change rapidly over time;the PSG and PSA of the latter are both composed of two high-order phase delay devices configured with a certain thick

关 键 词：频率调制 MUELLER矩阵 实时测量 椭偏技术 偏振探测 

分 类 号：O438.1[机械工程—光学工程]