硼扩散设备温度控制系统的研究与实现  

RESEARCH AND IMPLEMENTATION OF TEMPERATURE CONTROL SYSTEM FOR BORON DIFFUSION EQUIPMENT

作　　者：彭浩 黄心沿 吴志明 邹臻峰 Peng Hao;Huang Xinyan;Wu Zhiming;Zou Zhenfeng(Hunan Red Solar Photoelectricity Science and Technology Co.,Ltd,Changsha 410221,China;The 48th Research Institute of CETC,Changsha 410009,China;Central South University Sensing Technology Research,Changsha 410083,China)

机构地区：[1]湖南红太阳光电科技有限公司,长沙410221 [2]中国电子科技集团第四十八研究所,长沙410009 [3]中南大学传感技术研究所,长沙410083

出　　处：《太阳能》2024年第4期87-93,共7页Solar Energy

摘　　要：近年来,随着光伏行业持续快速的发展,n型TOPCon太阳电池技术路线得到市场认可,产能不断扩张。硼扩散设备作为TOPCon太阳电池核心工艺设备之一受到市场极大的关注,其温度控制系统在工艺生产过程起着决定性的作用。对比硼扩散设备实际应用过程中传统炉体使用水平插片方式和顺气流垂直插片方式后得到的硅片片间的方阻均匀性,发现水平插片方式存在舟内中层硅片方阻偏高,方阻均匀性不满足技术性指标要求的问题。对此设计了新型分区炉体,提出3种温度控制系统方案,并通过工艺验证得出满足技术性指标要求的方案。研究结果表明:分区炉体搭配水平插片方式时,采用温度控制系统方案3可以满足技术性指标的要求。In recent years,with the continuous and rapid development of the PV industry,the n-type TOPCon solar cells technology route has been recognized by the market,and production capacity has rapidly expanded.Boron diffusion equipment,as one of the core process equipment for TOPCon solar cells,has received great attention from the market,the temperature control system plays a decisive role in the production process of boron diffusion equipment.This paper compares the square resistance uniformity of silicon wafers obtained by using horizontal and vertical insertion methods in the traditional furnace during the practical application of boron diffusion equipment.It is found that the horizontal insertion method has the problem of high square resistance of the middle layer silicon wafers within the boat,and the square resistance uniformity does not meet the technical requirements.A new type of divisional furnace has been designed,and three types of temperature control system schemes have been proposed.Through process verification,a scheme that meets the technical requirements has been obtained.The research results show that when the divisional furnace is combined with the horizontal insertion method,the temperature control system scheme 3 can meet the technical requirements.

关 键 词：TOPCon太阳电池 硼扩散设备 温度控制系统 插片方式 分区炉体 

分 类 号：TM914.41[电气工程—电力电子与电力传动]