Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor  

作　　者：Famei WANG Changrui LIAO Mengqiang ZOU Dejun LIU Haoqiang HUANG Chao LIU Yiping WANG 

机构地区：[1]Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China [2]Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,China [3]School of Electronics Science,Northeast Petroleum University,Daqing 163318,China

出　　处：《Photonic Sensors》2024年第2期89-99,共11页光子传感器（英文版）

基　　金：supported by the Shenzhen Science and Technology Program (Grant No.RCYX20200714114524139);Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing (Grant No.ZDSYS20220606100405013);Natural Science Foundation of GuangdongProvince (Grant Nos.2022B1515120061 and 2022A1515110971);National Natural Science Foundation of China (Grant Nos.62122057,62075136,62105217,and 62305223);China Postdoctoral Science Foundation (Grant No.2022M722173).

摘　　要：Benefiting from the great advances of the femtosecond laser two-photon polymerization(TPP)technology,customized microcantilever probes can be accurately 3-dimensional(3D)manufactured at the nanoscale size and thus have exhibited considerable potentials in the fields of microforce,micro-vibration,and microforce sensors.In this work,a controllable microstructured cantilever probe on an optical fiber tip for microforce detection is demonstrated both theoretically and experimentally.The static performances of the probe are firstly investigated based on the finite element method(FEM),which provides the basis for the structural design.The proposed cantilever probe is then 3D printed by means of the TPP technology.The experimental results show that the elastic constant k of the proposed cantilever probe can be actively tuned from 2.46N/m to 62.35N/m.The force sensitivity is 2.5nm/μN,the Q-factor is 368.93,and the detection limit is 57.43nN.Moreover,the mechanical properties of the cantilever probe can be flexibly adjusted by the geometric configuration of the cantilever.Thus,it has an enormous potential for matching the mechanical properties of biological samples in the direct contact mode.

关 键 词：Optical fiber sensor microforce sensing microstructured cantilever two-photon polymerization 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]