高功率VCSEL激光器光束发散角的测量方法  

High power VCSEL lasers measurement method for beam divergence angle

作　　者：崔辰好 李正权 CUI Chen-hao;LI Zheng-quan(Shchool of Internet of Things Engineering,Jiangnan University,Wuxi 214122,China)

机构地区：[1]江南大学物联网工程学院,江苏无锡214122

出　　处：《激光与红外》2024年第4期508-515,共8页Laser & Infrared

基　　金：网络与交换技术全国重点实验室开放课题项目(No.SKLNST2023113)资助。

摘　　要：垂直腔面发射激光器(Vertical Cavity Surface Emitting Laser,简称VCSEL)由于其能发射出垂直于腔面光束的特性使得多个VCSEL激光器可以在同一片芯片上紧密集成,而不需要大量的空间;且VCSEL激光器使用共振腔的反射镜来增强光并放大,从而实现高效的光发射;通常情况下,VCSEL激光器的发光效率可以达到40至60之间,与传统的激光器相比,VCSEL激光器更容易实现高效率。由于VCSEL激光器的可集成性好、效率高等特点,使其广泛应用于3D感知、自动驾驶、光通信等领域。因此,VCSEL激光器的质量检测工作也显得越来越重要。随着VCSEL激光器进军高功率领域,其发光束的模式也经历了从基模变为高阶模的过程,光束已经从类高斯光束变为了类拉盖尔-高斯空心圆环光束。虽然传统的1/e^(2)、D86等算法在测量基模下的类高斯光束的发散角较为精确,但对于高阶模式下的类拉盖尔-高斯空心圆环光束,这些方法则出现了明显的误差。考虑到VCSEL激光器在自动驾驶等重要领域的广泛应用,其光束精确度的要求也随之提高。因此,本文采用了D4σ算法,针对类拉盖尔-高斯空心圆环光束进行发散角测量,与1/e^(2)、D86等传统算法进行了比较。结果显示,新方法在发散角测量准确度上最高提升了230。Vertical Cavity Surface Emitting Laser(VCSEL)is distinguished by its ability to emit light beams perpendicular to the cavity surface.This unique characteristic allows multiple VCSEL lasers to be densely integrated on a single chip without requiring a significant amount of space.Additionally,VCSEL lasers utilize the reflective mirrors of a resonant cavity to enhance and amplify the light,leading to efficient light emission.Typically,the luminous efficiency of VCSEL lasers can range between 40%and 60%.Compared to traditional lasers,VCSELs are more apt to achieve high efficiencies.Due to their excellent integrability and high efficiency,VCSELs have found broad applications in fields such as 3D perception,automatic driving,and optical communication.Hence,the quality inspection of VCSEL lasers is becoming increasingly vital.As VCSEL lasers venture into the high power domain,their light beam modes have evolved from fundamental mode to high order mode.The beam has transitioned from a Gaussian like beam to a Laguerre Gaussian hollow ring beam.While traditional methods such as 1/e^(2) and D86 are quite accurate for measuring the divergence angle of Gaussian like beams in fundamental mode,they exhibit notable discrepancies when applied to the Laguerre Gaussian hollow ring beams in high order mode.Given the widespread use of VCSEL lasers in crucial areas like autonomous driving,the demand for precise beam measurements has also surged.Therefore,this article adopts the D4σalgorithm to measure the divergence angle of the Laguerre Gaussian hollow ring beam and compares it with conventional methods like 1/e^(2) and D86.The results indicate that the new method enhances the accuracy of divergence angle measurements by up to 2.30%.

关 键 词：D4σ算法 光束质量 光束发散角 垂直腔面发射激光器 类拉盖尔-高斯空心圆环光束 

分 类 号：TN247[电子电信—物理电子学] O436[机械工程—光学工程]