临界喷嘴在真空泵抽速测试及计量中研究和应用  

Research and Application of Critical Nozzles in Vacuum Pump Speed Testing and Measurement

作　　者：徐法俭 刘继睿 袁铮 任昌青 姜云锋 董钦敏 XU Fajian;LIU Jirui;YUAN Zheng;REN Changqing;JIANG Yunfeng;DONG Qinmin(Zibo Vacuum Equipment Plant Co.,Ltd.,Zibo 255200,China;National Products Quality Inspection and Testing Center for Pumps(Shandong),Zibo 255200,China;Shenyang Pump Research Institute Co.,Ltd.,Shenyang 110869,China)

机构地区：[1]淄博真空设备厂有限公司,淄博255200 [2]国家泵类产品质量检验检测中心(山东),淄博255200 [3]沈阳水泵研究所有限公司,沈阳110869

出　　处：《真空科学与技术学报》2024年第4期325-331,共7页Chinese Journal of Vacuum Science and Technology

基　　金：泰山产业领军人才工程专项项目(tsls20230603)。

摘　　要：真空泵抽速测量有多种方法,其准确度受到方法、仪表精度等影响。其中定流量法作为其中一种方式,其建立在一元可压缩流体理论基础上。文章结合一元可压缩流体基础理论与现有测试方法,提出将喷嘴临界状态作为定流量法测量基础。通过喷嘴临界状态的出现以及临界值计算,作为真空泵流量的测量方法基准数值,测量过程中只需要测定环境参数就可以测定真空泵流量,进而计算真空泵在某规定压力下的抽速。该测量方法装置和过程简单,容易操作,外界因素影响自然降低到最低,是一种可靠、绿色测量方法。抽速作为真空泵最重要参量,数字化、智能化测量是发展方向,准确的抽速测定是真空泵及系统优化的依据,将推动真空技术发展。There are various methods for measuring the pumping speed of vacuum pumps,and their accuracy is affected by methods,instrument accuracy,and other factors.The constant flow method,as one of the methods,is based on the theory of compressible fluids in one element.The article combines the basic theory of one-dimensional compressible fluids with existing testing methods,proposing to use the critical state of the nozzle as the basis for measuring the constant flow rate method.By the appearance of the critical state of the nozzle and the calculation of the critical value,as the benchmark value for measuring the flow rate of the vacuum pump,only environmental parameters need to be measured during the measurement process to determine the flow rate of the vacuum pump,and then determine the pumping speed of the vacuum pump at a specified pressure.This measurement method has a simple device and process,is easy to operate,and the influence of external factors is naturally minimized.It is a reliable and green measurement method.As the most important parameter of vacuum pumps,digital and intelligent measurement is the development direction.Accurate pumping speed measurement is the basis for optimizing vacuum pumps and systems,which will promote the development of vacuum technology.

关 键 词：一元气体方程 临界状态 临界参数 计量喷嘴 亚音速 抽速测量 

分 类 号：TH36[机械工程—机械制造及自动化]