阵列微空心阴极维持放电模拟研究  

Simulation on the arrayed microhollow cathode sustained discharges

作　　者：何寿杰[1,2] 方振松 邓佳松 丛日东[1] 贺亚峰[1] 李庆[1,2] HE ShouJie;FANG ZhenSong;DENG JiaSong;CONG RiDong;HE YaFeng;LI Qing(College of Physical Science and Technology,Hebei University,Baoding 071002,China;Engineering Research Centre of Zero-Carbon Energy Building and Metering Technology,Ministry of Education,Hebei University,Baoding 071002,China)

机构地区：[1]河北大学物理科学与技术学院,保定071002 [2]河北大学零碳能源建筑与计量技术教育部工程研究中心,保定071002

出　　处：《中国科学：物理学、力学、天文学》2024年第4期158-171,共14页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:U23A20678,12275064);河北省自然科学基金(编号:E2021201037,E2022201057);中央引导地方科技发展资金(编号:236Z1803G);河北大学科研创新团队项目(编号:IT2023B03)资助。

摘　　要：本文基于流体模型模拟研究了阵列微空心阴极维持放电(MCSD)的时空动力学特性,特别对不同电极表面电流的变化规律及其与带电粒子密度和电场等微观参量的关系进行了深入分析.模拟结果表明,随着阴极电流的增加放电分为4个阶段.第一阶段为类汤生放电阶段,此时三个电极上的电流、空间电荷密度和电场强度均很低.第二阶段为空腔内放电击穿阶段,此阶段空腔内放电击穿,并产生明显的空心阴极效应.微空心阴极(MHCD)两电极表面电流、空腔内带电粒子密度和电场强度迅速升高.但是此时MHCD电极中的阳极(第一阳极)仍然为阳极角色,MHCD和第三电极间(第二阳极)放电未击穿.第三阶段,微空心阴极和第三电极空间的放电逐渐击穿,MHCD中阴极和第一阳极表面电流方向相同,第一阳极逐渐由阳极转变为阴极角色,并在其附近形成较明显的阴极鞘层结构,MCSD放电空间的带电粒子密度迅速升高.第四阶段为放电的稳态阶段,形成稳定的阵列微空心阴极维持辉光放电,MCSD放电结构中各电极表面电流之间满足定量关系.模拟结果同时表明,除了微空心阴极放电,第三电极辉光放电对空腔内放电和阵列MCSD放电的形成均具有重要的促进作用.阵列MCSD为MHCD放电和第三电极辉光放电共同作用形成的.The spatiotemporal dynamics of arrayed microhollow cathode sustained discharge(MCSD)are simulated using a fluid model in this study.In particular,the dependence of discharge currents on different electrode surfaces on microscopic plasma parameters such as charged particle density and electric field are investigated in detail.The simulation results reveal that the discharge is divided into four stages with increasing cathode current.The first stage is a Townsend-like discharge wherein the discharge currents on three electrodes,and the space charge densities and electric field are extremely low.The second stage is the breakdown stage of the discharge in the cavity,in which the discharge in the cavity breaks down and a clear hollow cathode effect appears.The discharge currents on the two MHCD electrodes,density of charged particles in the cavity,and electric field increase rapidly.However,the anode(first anode)in the MHCD electrode remains in the anodic role,and the discharge between the MHCD and third electrode(second anode)is not broken down.In the third stage,discharge in the space between the MHCD and third electrode gradually breaks down,and the direction of the currents on the surfaces of the cathode and the first anode in MHCD is identical.The first anode gradually changes from an anode to a cathode,forming a cathode sheath layer around the first anode.The charged particle density in the MCSD discharge space increases rapidly.The fourth stage is the steady-state phase of the discharge,in which a stable arrayed MCSD is formed,and the quantitative relationship between surface currents of each electrode in the MCSD discharge structure is satisfied.Furthermore,in addition to the MHCD discharge,the third electrode glow discharge plays a crucial role in promoting the formation of the MHCD and MCSD discharge.The arrayed MCSD is formed by the combined effect of the MHCD and third electrode glow discharges.

关 键 词：微放电 阵列微空心阴极维持放电 流体模型 放电特性 

分 类 号：O461.2[理学—电子物理学]