基于兰姆波谐振器和超表面的谐振式热红外探测器研究  

Research on Resonant Thermal Infrared Detector Based on Lamb Wave Resonator and Metasurface

作　　者：林叶繁 党岩盟 孙海燕[1] 赵继聪 王鹏[2] LIN Yefan;DANG Yanmeng;SUN Haiyan;ZHAO Jicong;WANG Peng(Jiangsu Key Laboratory of ASIC Design,Nantong University,Nantong Jiangsu 226019,China;State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200437,China)

机构地区：[1]南通大学专用集成电路设计重点实验室,江苏南通226019 [2]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200437

出　　处：《传感技术学报》2024年第3期381-388,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(62174092);红外物理国家重点实验室开放课题(SITP-NLIST-ZD-2023-04)。

摘　　要：设计了一种基于氮化铝(AlN)兰姆波谐振器和超表面的谐振式热红外探测器,基于超表面的吸收器用于对特定波长红外辐射的吸收,再利用AlN兰姆波谐振器的温度频率效应检测红外辐射。首先,对兰姆波谐振器的电极周期、电极宽度、AlN薄膜厚度和支撑轴尺寸进行优化设计,设计了电极周期分别为12μm和1.2μm的谐振器结构,其工作频率分别为365 MHz和2544 MHz。其次,设计了方形结构超表面的等离子体吸收器,并研究分析其红外吸收机理及结构尺寸对吸收性能的影响规律。通过集成超表面红外吸收器并调节吸收结构尺寸,实现可调谐、近100%的双带吸收性能,在3μm~5μm和8μm~12μm处的吸收率均超过99.5%,谐振式热红外探测器的响应时间低于0.8 ms、热噪声等效功率低于10^(-11)Hz/μW。A resonant thermal infrared detector based on AlN Lamb wave resonator and metasurface is designed.The detector detects infrared radiation by absorbing infrared light and causing the temperature-frequency effect of the resonator.The electrode period,electrode width,AlN thickness and anchor of the resonator are optimized and the resonator with electrode period of 12μm and 1.2μm is designed,and its working frequency is 365 MHz and 2544 MHz.The square metasurface is designed,and its infrared absorption mechanism and the influence of structure size on the absorption peak are studied.Dual-band tunable and the absorption rates achieving over 99.5%at 3μm-5μm and 8μm-12μm are realized by integrating the metasurface and adjusting its size,the response time of the resonant thermal infrared detector is less than 0.8 ms,and the thermal noise equivalent power exceeds 10~(-11)Hz/μW.

关 键 词：红外探测技术 热探测器 兰姆波谐振器 等离子体 

分 类 号：TN215[电子电信—物理电子学] TN4