100 GHz双频带通腔体滤波器的设计及制作工艺研究  

Research on Design and Manufacturing Process of 100 GHz Dual-Band Pass Cavity Filter

作　　者：冯伟 雷程 秦瑞杰 张斌珍 段俊萍 熊继军 FENG Wei;LEI Cheng;QIN Ruijie;ZHANG Binzhen;DUAN Junping;XIONG Jijun(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]中北大学仪器与电子学院,省部共建动态测试技术国家重点实验室,山西太原030051

出　　处：《传感技术学报》2024年第3期416-422,共7页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51935011,52175555,51821003);中央引导地方科技发展资金项目(YDZJSX20231B006);山西省科技重大专项计划“揭榜挂帅”项目(202201030201010);山西省高等学校中青年拔尖创新人才;山西省“1331工程”重点学科建设基金资助项目。

摘　　要：针对当前双频或多频带通滤波器主要以30 GHz以内的工作范围为主,在高频毫米波范围内以单频超宽带设计为主这一现象,设计出一款可以在100 GHz~103 GHz工作范围内存在两个超窄带工作带宽的双频腔体滤波器。两个工作频段分别为100.67 GHz~101.36 GHz和102.67 GHz~102.78 GHz,与之对应的相对带宽分别为0.68%和0.11%。所设计腔体滤波器采用UV-LIGA工艺完成其样品的制备,并使用由矢量网络分析仪和扩频模块所搭建的测试平台完成测试,经测试,相对带宽的绝对误差分别为0.19%和0.02%。Aiming at the phenomenon that the current dual-frequency or multi-band pass filter is mainly based on the working range within 30 GHz,and the single-frequency ultra-wideband design is the mainstay in the high-frequency millimeter wave range,a model of dual-band cavity filter that can work in the 100 GHz~103 GHz range with two operating band is designed.The two working frequency bands are 100.67 GHz~101.36 GHz and 102.67 GHz~102.78 GHz,and the corresponding relative bandwidths are 0.68% and 0.11%,respectively.The designed cavity filter is manufactured with the UV-LIGA process,and the test platform is built with the vector net analyzer and the spread spectrum module to complete the test.The test results show that the absolute error of the relative bandwidth is 0.19% and 0.02% respectively.

关 键 词：腔体滤波器 双频 UV-LIGA工艺 非谐振节点 超窄带 

分 类 号：TN713[电子电信—电路与系统]