超纯氩的纯化与检测  

Purification and Detection of Ultrapure Argon

作　　者：任越[1] REN Yue(Zhonghao Guangming Research&Design Institute of Chemical Industry Co.,Ltd.,Dalian 116308,China)

机构地区：[1]中昊光明化工研究设计院有限公司,辽宁大连116308

出　　处：《低温与特气》2024年第2期33-36,47,共5页Low Temperature and Specialty Gases

摘　　要：介绍了氩气纯化器的纯化工艺和超纯氩的检测方法,对超纯氩检测的结果表明,该纯化工艺满足超纯氩生产要求,该检测方法具有检测可靠性。The purification process of argon purifier and the detection method of ultrapure argon are introduced.The detection results of ultra-pure argon show that the purification process meets the requirement for ultrapure argon production and the detection method has detection reliability.

关 键 词：超纯氩 纯化器 吸气剂 

分 类 号：TQ116.1[化学工程—无机化工]